Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Paul Janin, Ralf Bauer, Paul Griffin, Erling Riis, Deepak Uttamchandani

Research output: Contribution to conference › Abstract › peer-review

4 Citations (Scopus)

88 Downloads (Pure)

4 Citations
1 Conference contribution book
1 Paper

2 results

2021
A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications
Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 25 Jan 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). New York, USA: IEEE, p. 294-297 4 p. (IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Open Access
File
1 Citation (Scopus)

62 Downloads (Pure)
2018
Characterization of a fast piezoelectric varifocal MEMS mirror
Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 29 Jul 2018. 2 p.
Research output: Contribution to conference › Paper › peer-review

Open Access
File
6 Citations (Scopus)

91 Downloads (Pure)