Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Paul Janin; Ralf Bauer; Paul Griffin; Erling Riis; Deepak Uttamchandani

doi:10.1109/OMN.2019.8925168

Abstract

We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.

Original language	English
Number of pages	2
DOIs	https://doi.org/10.1109/OMN.2019.8925168
Publication status	Published - 9 Dec 2019
Event	IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019) - KAIST, Daejeon, Korea, Republic of Duration: 28 Jul 2019 → 1 Aug 2019 http://www.omn2019.org.

Conference

Conference	IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019)
Abbreviated title	OMN2019
Country/Territory	Korea, Republic of
City	Daejeon
Period	28/07/19 → 1/08/19
Internet address	http://www.omn2019.org.

Keywords

optical MEMS
piezoelectric
scanning mirror
high frequency

Access to Document

10.1109/OMN.2019.8925168

Janin-etal-OMN-2019-Fast-piezoelectric-scanning-MEMS-mirror-for-1DAccepted author manuscript, 1.31 MB

4 Citations
1 Conference contribution book
1 Paper

A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications
Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 25 Jan 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). New York, USA: IEEE, p. 294-297 4 p. (IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Open Access
File
1 Citation (Scopus)

64 Downloads (Pure)
Characterization of a fast piezoelectric varifocal MEMS mirror
Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 29 Jul 2018. 2 p.
Research output: Contribution to conference › Paper › peer-review

Open Access
File

1 Oral presentation

Conference talks on projects in optical MEMS for biomedical imaging and quantum optics
Bauer, R. (Speaker)
28 Jul 2019 → 1 Aug 2019
Activity: Talk or Presentation › Oral presentation

Cite this

@conference{c78731a15fba462e91f353eae839807f,

title = "Fast piezoelectric scanning MEMS mirror for 1D ion adressing",

abstract = "We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.",

keywords = "optical MEMS, piezoelectric, scanning mirror, high frequency",

author = "Paul Janin and Ralf Bauer and Paul Griffin and Erling Riis and Deepak Uttamchandani",

note = "{\textcopyright} 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), OMN2019 ; Conference date: 28-07-2019 Through 01-08-2019",

year = "2019",

month = dec,

day = "9",

doi = "10.1109/OMN.2019.8925168",

language = "English",

url = "http://www.omn2019.org.",

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TY - CONF

T1 - Fast piezoelectric scanning MEMS mirror for 1D ion adressing

AU - Janin, Paul

AU - Bauer, Ralf

AU - Griffin, Paul

AU - Riis, Erling

AU - Uttamchandani, Deepak

N1 - © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2019/12/9

Y1 - 2019/12/9

N2 - We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.

AB - We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.

KW - optical MEMS

KW - piezoelectric

KW - scanning mirror

KW - high frequency

U2 - 10.1109/OMN.2019.8925168

DO - 10.1109/OMN.2019.8925168

M3 - Abstract

T2 - IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019)

Y2 - 28 July 2019 through 1 August 2019

ER -

Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Abstract

Conference

Keywords

Access to Document

Fingerprint

Research output

A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications

Characterization of a fast piezoelectric varifocal MEMS mirror

Activities

Conference talks on projects in optical MEMS for biomedical imaging and quantum optics

Cite this