Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Research output: Contribution to conferenceAbstract

15 Downloads (Pure)

Abstract

We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.
Original languageEnglish
Number of pages2
DOIs
Publication statusPublished - 9 Dec 2019
EventIEEE International Conference on Optical MEMS and Nanophotonics (OMN2019) - KAIST, Daejeon, Korea, Republic of
Duration: 28 Jul 20191 Aug 2019
http://www.omn2019.org.

Conference

ConferenceIEEE International Conference on Optical MEMS and Nanophotonics (OMN2019)
Abbreviated titleOMN2019
CountryKorea, Republic of
CityDaejeon
Period28/07/191/08/19
Internet address

Fingerprint

Space optics
microelectromechanical systems
MEMS
Natural frequencies
Mirrors
mirrors
Scanning
Silicon
scanning
Ions
resonant frequencies
ions
insulators
optics
silicon

Keywords

  • optical MEMS
  • piezoelectric
  • scanning mirror
  • high frequency

Cite this

Janin, P., Bauer, R., Griffin, P., Riis, E., & Uttamchandani, D. (2019). Fast piezoelectric scanning MEMS mirror for 1D ion adressing. Abstract from IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), Daejeon, Korea, Republic of. https://doi.org/10.1109/OMN.2019.8925168
Janin, Paul ; Bauer, Ralf ; Griffin, Paul ; Riis, Erling ; Uttamchandani, Deepak. / Fast piezoelectric scanning MEMS mirror for 1D ion adressing. Abstract from IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), Daejeon, Korea, Republic of.2 p.
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title = "Fast piezoelectric scanning MEMS mirror for 1D ion adressing",
abstract = "We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.",
keywords = "optical MEMS, piezoelectric, scanning mirror, high frequency",
author = "Paul Janin and Ralf Bauer and Paul Griffin and Erling Riis and Deepak Uttamchandani",
note = "{\circledC} 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), OMN2019 ; Conference date: 28-07-2019 Through 01-08-2019",
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Janin, P, Bauer, R, Griffin, P, Riis, E & Uttamchandani, D 2019, 'Fast piezoelectric scanning MEMS mirror for 1D ion adressing', IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), Daejeon, Korea, Republic of, 28/07/19 - 1/08/19. https://doi.org/10.1109/OMN.2019.8925168

Fast piezoelectric scanning MEMS mirror for 1D ion adressing. / Janin, Paul; Bauer, Ralf; Griffin, Paul; Riis, Erling; Uttamchandani, Deepak.

2019. Abstract from IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), Daejeon, Korea, Republic of.

Research output: Contribution to conferenceAbstract

TY - CONF

T1 - Fast piezoelectric scanning MEMS mirror for 1D ion adressing

AU - Janin, Paul

AU - Bauer, Ralf

AU - Griffin, Paul

AU - Riis, Erling

AU - Uttamchandani, Deepak

N1 - © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2019/12/9

Y1 - 2019/12/9

N2 - We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.

AB - We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.

KW - optical MEMS

KW - piezoelectric

KW - scanning mirror

KW - high frequency

U2 - 10.1109/OMN.2019.8925168

DO - 10.1109/OMN.2019.8925168

M3 - Abstract

ER -

Janin P, Bauer R, Griffin P, Riis E, Uttamchandani D. Fast piezoelectric scanning MEMS mirror for 1D ion adressing. 2019. Abstract from IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), Daejeon, Korea, Republic of. https://doi.org/10.1109/OMN.2019.8925168