Fast piezoelectric scanning MEMS mirror for 1D ion adressing

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Abstract

We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.
Original languageEnglish
Number of pages2
DOIs
Publication statusPublished - 9 Dec 2019
EventIEEE International Conference on Optical MEMS and Nanophotonics (OMN2019) - KAIST, Daejeon, Korea, Republic of
Duration: 28 Jul 20191 Aug 2019
http://www.omn2019.org.

Conference

ConferenceIEEE International Conference on Optical MEMS and Nanophotonics (OMN2019)
Abbreviated titleOMN2019
Country/TerritoryKorea, Republic of
CityDaejeon
Period28/07/191/08/19
Internet address

Keywords

  • optical MEMS
  • piezoelectric
  • scanning mirror
  • high frequency

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