Facet recovery and light emission from GaN/InGaN/GaN core-shell structures grown by metal organic vapour phase epitaxy on etched GaN nanorod arrays

E D Le Boulbar, I Gîrgel, C Lewins, P R Edwards, R W Martin, A Satka, D W E Allsopp, P A Shields

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Abstract

The use of etched nanorods from a planar template as a growth scaffold for a highly regular GaN/InGaN/GaN core-shell structure is demonstrated. The recovery of m-plane non-polar facets from etched high-aspect-ratio GaN nanorods is studied with and without the introduction of a hydrogen silsesquioxane passivation layer at the bottom of the etched nanorod arrays. This layer successfully prevented c-plane growth between the nanorods, resulting in vertical nanorod sidewalls (∼89.8°) and a more regular height distribution than re-growth on unpassivated nanorods. The height variation on passivated nanorods is solely determined by the uniformity of nanorod diameter, which degrades with increased growth duration. Facet-dependent indium incorporation of GaN/InGaN/GaN core-shell layers regrown onto the etched nanorods is observed by high-resolution cathodoluminescence imaging. Sharp features corresponding to diffracted wave-guide modes in angle-resolved photoluminescence measurements are evidence of the uniformity of the full core-shell structure grown on ordered etched nanorods.
Original languageEnglish
Article number094302
Number of pages11
JournalJournal of Applied Physics
Volume114
Early online date3 Sep 2013
DOIs
Publication statusPublished - 2013

Keywords

  • facet recovery
  • light emission
  • GaN/InGaN/GaN
  • core-shell structures
  • metal organic vapour phase epitaxy
  • GaN nanorod arrays

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