Fabrication of two-dimensional InGaN-based micro-LED arrays

C.W. Jeon, K.S. Kim, M.D. Dawson

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

We have successfully fabricated two-dimensional InGaN-based 12 × 12 micro-light emitting diode (LED) arrays with individually addressable emitters having diameters of 8 and 12 m. A new planarisation scheme including gap-filling with plasma enhanced chemical vapour deposition (PECVD) SiO2 and a chemical-mechanical polishing process was successfully developed for the electrical isolation of individual diodes. The uniformity of elements within an array was demonstrated through their electroluminescence and I-V characteristics.
LanguageEnglish
Pages325-328
Number of pages3
JournalPhysica Status Solidi A
Volume192
Issue number2
DOIs
Publication statusPublished - Jul 2002

Fingerprint

Chemical mechanical polishing
Electroluminescence
Plasma enhanced chemical vapor deposition
Light emitting diodes
Diodes
light emitting diodes
Fabrication
fabrication
polishing
electroluminescence
isolation
emitters
diodes
vapor deposition

Keywords

  • plasma
  • mechanics
  • chemistry

Cite this

Jeon, C.W. ; Kim, K.S. ; Dawson, M.D. / Fabrication of two-dimensional InGaN-based micro-LED arrays. In: Physica Status Solidi A. 2002 ; Vol. 192, No. 2. pp. 325-328.
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Fabrication of two-dimensional InGaN-based micro-LED arrays. / Jeon, C.W.; Kim, K.S.; Dawson, M.D.

In: Physica Status Solidi A, Vol. 192, No. 2, 07.2002, p. 325-328.

Research output: Contribution to journalArticle

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AU - Kim, K.S.

AU - Dawson, M.D.

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N2 - We have successfully fabricated two-dimensional InGaN-based 12 × 12 micro-light emitting diode (LED) arrays with individually addressable emitters having diameters of 8 and 12 m. A new planarisation scheme including gap-filling with plasma enhanced chemical vapour deposition (PECVD) SiO2 and a chemical-mechanical polishing process was successfully developed for the electrical isolation of individual diodes. The uniformity of elements within an array was demonstrated through their electroluminescence and I-V characteristics.

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KW - chemistry

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