Fabrication of two-dimensional InGaN-based micro-LED arrays

C.W. Jeon, K.S. Kim, M.D. Dawson

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Abstract

We have successfully fabricated two-dimensional InGaN-based 12 × 12 micro-light emitting diode (LED) arrays with individually addressable emitters having diameters of 8 and 12 m. A new planarisation scheme including gap-filling with plasma enhanced chemical vapour deposition (PECVD) SiO2 and a chemical-mechanical polishing process was successfully developed for the electrical isolation of individual diodes. The uniformity of elements within an array was demonstrated through their electroluminescence and I-V characteristics.
Original languageEnglish
Pages (from-to)325-328
Number of pages3
JournalPhysica Status Solidi A
Volume192
Issue number2
DOIs
Publication statusPublished - Jul 2002

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Keywords

  • plasma
  • mechanics
  • chemistry

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