Fabrication of nanoscale pits with high throughput on polymer thin film using AFM tip-based dynamic plowing lithography

Yang He, Yanquan Geng, Yongda Yan, Xichun Luo

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We show that an atomic force microscope (AFM) tip-based dynamic plowing lithography (DPL) approach can be used to fabricate nano-scale pits with high throughput. The method relies on scratching with a relatively large speed over a sample surface in tapping mode, which is responsible for the separation distance of adjacent pits. Scratching tests are carried out on a poly(methyl methacrylate) (PMMA) thin film using a diamond-like carbon coating tip. Results show that 100 μm/s is the critical value of the scratching speed. When the scratching speed is greater than 100 μm/s, pit structures can be generated. In contrast, nanogrooves can be formed with speeds less than the critical value. Because of the difficulty of breaking the molecular chain of glass-state polymer with an applied high-frequency load and low-energy dissipation in one interaction of the tip and the sample, one pit requires 65–80 penetrations to be achieved. Subsequently, the forming process of the pit is analyzed in detail, including three phases: elastic deformation, plastic deformation, and climbing over the pile-up. In particular, 4800–5800 pits can be obtained in one second using this proposed method. Both experiments and theoretical analysis are presented that fully determine the potential of this proposed method to fabricate pits efficiently.
LanguageEnglish
Article number544
Number of pages11
JournalNanoscale Research Letters
Volume12
DOIs
Publication statusPublished - 22 Sep 2017

Fingerprint

plowing
Polymer films
Lithography
Microscopes
lithography
microscopes
Throughput
Fabrication
Thin films
fabrication
polymers
thin films
Diamond
Elastic deformation
Polymethyl Methacrylate
Polymethyl methacrylates
Piles
Diamonds
Plastic deformation
Energy dissipation

Keywords

  • nanoscale pit
  • nanogroove
  • fast-scan nanolithography
  • DPL
  • AFM
  • PMMA film
  • atomic force microscope
  • dynamic plowing lithography
  • poly(methyl methacrylate)
  • thin films

Cite this

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title = "Fabrication of nanoscale pits with high throughput on polymer thin film using AFM tip-based dynamic plowing lithography",
abstract = "We show that an atomic force microscope (AFM) tip-based dynamic plowing lithography (DPL) approach can be used to fabricate nano-scale pits with high throughput. The method relies on scratching with a relatively large speed over a sample surface in tapping mode, which is responsible for the separation distance of adjacent pits. Scratching tests are carried out on a poly(methyl methacrylate) (PMMA) thin film using a diamond-like carbon coating tip. Results show that 100 μm/s is the critical value of the scratching speed. When the scratching speed is greater than 100 μm/s, pit structures can be generated. In contrast, nanogrooves can be formed with speeds less than the critical value. Because of the difficulty of breaking the molecular chain of glass-state polymer with an applied high-frequency load and low-energy dissipation in one interaction of the tip and the sample, one pit requires 65–80 penetrations to be achieved. Subsequently, the forming process of the pit is analyzed in detail, including three phases: elastic deformation, plastic deformation, and climbing over the pile-up. In particular, 4800–5800 pits can be obtained in one second using this proposed method. Both experiments and theoretical analysis are presented that fully determine the potential of this proposed method to fabricate pits efficiently.",
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Fabrication of nanoscale pits with high throughput on polymer thin film using AFM tip-based dynamic plowing lithography. / He, Yang; Geng, Yanquan; Yan, Yongda; Luo, Xichun.

In: Nanoscale Research Letters, Vol. 12, 544, 22.09.2017.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Fabrication of nanoscale pits with high throughput on polymer thin film using AFM tip-based dynamic plowing lithography

AU - He, Yang

AU - Geng, Yanquan

AU - Yan, Yongda

AU - Luo, Xichun

PY - 2017/9/22

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N2 - We show that an atomic force microscope (AFM) tip-based dynamic plowing lithography (DPL) approach can be used to fabricate nano-scale pits with high throughput. The method relies on scratching with a relatively large speed over a sample surface in tapping mode, which is responsible for the separation distance of adjacent pits. Scratching tests are carried out on a poly(methyl methacrylate) (PMMA) thin film using a diamond-like carbon coating tip. Results show that 100 μm/s is the critical value of the scratching speed. When the scratching speed is greater than 100 μm/s, pit structures can be generated. In contrast, nanogrooves can be formed with speeds less than the critical value. Because of the difficulty of breaking the molecular chain of glass-state polymer with an applied high-frequency load and low-energy dissipation in one interaction of the tip and the sample, one pit requires 65–80 penetrations to be achieved. Subsequently, the forming process of the pit is analyzed in detail, including three phases: elastic deformation, plastic deformation, and climbing over the pile-up. In particular, 4800–5800 pits can be obtained in one second using this proposed method. Both experiments and theoretical analysis are presented that fully determine the potential of this proposed method to fabricate pits efficiently.

AB - We show that an atomic force microscope (AFM) tip-based dynamic plowing lithography (DPL) approach can be used to fabricate nano-scale pits with high throughput. The method relies on scratching with a relatively large speed over a sample surface in tapping mode, which is responsible for the separation distance of adjacent pits. Scratching tests are carried out on a poly(methyl methacrylate) (PMMA) thin film using a diamond-like carbon coating tip. Results show that 100 μm/s is the critical value of the scratching speed. When the scratching speed is greater than 100 μm/s, pit structures can be generated. In contrast, nanogrooves can be formed with speeds less than the critical value. Because of the difficulty of breaking the molecular chain of glass-state polymer with an applied high-frequency load and low-energy dissipation in one interaction of the tip and the sample, one pit requires 65–80 penetrations to be achieved. Subsequently, the forming process of the pit is analyzed in detail, including three phases: elastic deformation, plastic deformation, and climbing over the pile-up. In particular, 4800–5800 pits can be obtained in one second using this proposed method. Both experiments and theoretical analysis are presented that fully determine the potential of this proposed method to fabricate pits efficiently.

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