Fabrication of matrix-addressable InGaN-based microdisplays of high array density

C.W. Jeon, H.W. Choi, M.D. Dawson

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

We describe the fabrication and characterization of matrix-addressable microlight-emitting diode (micro-LED) arrays based on InGaN, having elemental diameter of 20 m and array size of up to 128x96 elements. The introduction of a planar topology prior to contact metallization is an important processing step in advancing the performance of these devices. Planarization is achieved by chemical-mechanical polishing of the SiO2-deposited surface. In this way, the need for a single contact pad for each individual element can be eliminated. The resulting significant simplification in the addressing of the pixels opens the way to scaling to devices with large numbers of elements. Compared to conventional broad-area LEDs, the micrometer-scale devices exhibit superior light output and current handling capabilities, making them excellent candidates for a range of uses including high-efficiency and robust microdisplays.
LanguageEnglish
Pages1516-1518
Number of pages2
JournalIEEE Photonics Technology Letters
Volume15
Issue number11
DOIs
Publication statusPublished - Nov 2003

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Chemical mechanical polishing
Metallizing
Light emitting diodes
Diodes
Pixels
Fabrication
fabrication
matrices
polishing
micrometers
electric contacts
light emitting diodes
pixels
diodes
scaling
output

Keywords

  • GaN
  • microdisplays
  • microlight-emitting diodes
  • micro-LEDs

Cite this

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abstract = "We describe the fabrication and characterization of matrix-addressable microlight-emitting diode (micro-LED) arrays based on InGaN, having elemental diameter of 20 m and array size of up to 128x96 elements. The introduction of a planar topology prior to contact metallization is an important processing step in advancing the performance of these devices. Planarization is achieved by chemical-mechanical polishing of the SiO2-deposited surface. In this way, the need for a single contact pad for each individual element can be eliminated. The resulting significant simplification in the addressing of the pixels opens the way to scaling to devices with large numbers of elements. Compared to conventional broad-area LEDs, the micrometer-scale devices exhibit superior light output and current handling capabilities, making them excellent candidates for a range of uses including high-efficiency and robust microdisplays.",
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Fabrication of matrix-addressable InGaN-based microdisplays of high array density. / Jeon, C.W.; Choi, H.W.; Dawson, M.D.

In: IEEE Photonics Technology Letters, Vol. 15, No. 11, 11.2003, p. 1516-1518.

Research output: Contribution to journalArticle

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AU - Choi, H.W.

AU - Dawson, M.D.

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