Fabrication of freeform micro optics by focused ion beam

J. Sun, X. Luo, W. Chang, J.M. Ritchie

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

In this work, two kinds of freeform micro optics were successfully fabricated by using focused ion beam machining. A divergence compensation method was applied to optimize the machining process. Both dynamic variation of the sputter yield and the extra ion flux contributed by the beam tail were taken into consideration. Measurement results on the surface topography indicated that 3-fold improvement of the relative divergence was achieved for both optics when compared with conventional focused ion beam milling without any corrections. Furthermore, investigations on the influences of scanning strategies, including raster scan, serpentine scan and contour scan, were carried out. The serpentine scan is recommended for the fabrication of freeform optics by focused ion beam technology owing to the minimal beam travelling distance over the pattern area.
LanguageEnglish
Title of host publicationKey Engineering Materials
Pages414-419
Number of pages6
Volume516
DOIs
Publication statusPublished - 2012

Fingerprint

Microoptics
Focused ion beams
Fabrication
Optics
Machining
Surface topography
Ions
Fluxes
Scanning

Keywords

  • focused ion beam
  • micro optics
  • freeform structure
  • divergence compensation
  • scanning strategy

Cite this

Sun, J., Luo, X., Chang, W., & Ritchie, J. M. (2012). Fabrication of freeform micro optics by focused ion beam. In Key Engineering Materials (Vol. 516, pp. 414-419) https://doi.org/10.4028/www.scientific.net/KEM.516.414
Sun, J. ; Luo, X. ; Chang, W. ; Ritchie, J.M. / Fabrication of freeform micro optics by focused ion beam. Key Engineering Materials. Vol. 516 2012. pp. 414-419
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Sun, J, Luo, X, Chang, W & Ritchie, JM 2012, Fabrication of freeform micro optics by focused ion beam. in Key Engineering Materials. vol. 516, pp. 414-419. https://doi.org/10.4028/www.scientific.net/KEM.516.414

Fabrication of freeform micro optics by focused ion beam. / Sun, J.; Luo, X.; Chang, W.; Ritchie, J.M.

Key Engineering Materials. Vol. 516 2012. p. 414-419.

Research output: Chapter in Book/Report/Conference proceedingChapter

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Sun J, Luo X, Chang W, Ritchie JM. Fabrication of freeform micro optics by focused ion beam. In Key Engineering Materials. Vol. 516. 2012. p. 414-419 https://doi.org/10.4028/www.scientific.net/KEM.516.414