TY - CHAP
T1 - Fabrication of freeform micro optics by focused ion beam
AU - Sun, J.
AU - Luo, X.
AU - Chang, W.
AU - Ritchie, J.M.
PY - 2012
Y1 - 2012
N2 - In this work, two kinds of freeform micro optics were successfully fabricated by using focused ion beam machining. A divergence compensation method was applied to optimize the machining process. Both dynamic variation of the sputter yield and the extra ion flux contributed by the beam tail were taken into consideration. Measurement results on the surface topography indicated that 3-fold improvement of the relative divergence was achieved for both optics when compared with conventional focused ion beam milling without any corrections. Furthermore, investigations on the influences of scanning strategies, including raster scan, serpentine scan and contour scan, were carried out. The serpentine scan is recommended for the fabrication of freeform optics by focused ion beam technology owing to the minimal beam travelling distance over the pattern area.
AB - In this work, two kinds of freeform micro optics were successfully fabricated by using focused ion beam machining. A divergence compensation method was applied to optimize the machining process. Both dynamic variation of the sputter yield and the extra ion flux contributed by the beam tail were taken into consideration. Measurement results on the surface topography indicated that 3-fold improvement of the relative divergence was achieved for both optics when compared with conventional focused ion beam milling without any corrections. Furthermore, investigations on the influences of scanning strategies, including raster scan, serpentine scan and contour scan, were carried out. The serpentine scan is recommended for the fabrication of freeform optics by focused ion beam technology owing to the minimal beam travelling distance over the pattern area.
KW - focused ion beam
KW - micro optics
KW - freeform structure
KW - divergence compensation
KW - scanning strategy
UR - http://www.scopus.com/inward/record.url?scp=84862737897&partnerID=8YFLogxK
UR - http://eprints.hud.ac.uk/16349/
U2 - 10.4028/www.scientific.net/KEM.516.414
DO - 10.4028/www.scientific.net/KEM.516.414
M3 - Chapter
AN - SCOPUS:84862737897
SN - 9783037854280
VL - 516
SP - 414
EP - 419
BT - Key Engineering Materials
ER -