Fabrication of a micro-size diamond tool using a focused ion beam

X Ding, G C Lim, C K Cheng, David Lee Butler, K C Shaw, K Liu, W S Fong

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.

LanguageEnglish
Article number075017
Number of pages10
JournalJournal of Micromechanics and Microengineering
Volume18
Issue number7
DOIs
Publication statusPublished - 9 Jun 2008
Externally publishedYes

Fingerprint

Diamond
Focused ion beams
Diamonds
diamonds
ion beams
Ions
Fabrication
fabrication
Sputtering
sputtering
Cutting tools
machining
ion currents
Surface morphology
Machining
ions
incidence
Crystalline materials
Substrates
Experiments

Keywords

  • cutting tools
  • focused ion beam
  • diamond block

Cite this

Ding, X ; Lim, G C ; Cheng, C K ; Butler, David Lee ; Shaw, K C ; Liu, K ; Fong, W S. / Fabrication of a micro-size diamond tool using a focused ion beam. In: Journal of Micromechanics and Microengineering. 2008 ; Vol. 18, No. 7.
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Fabrication of a micro-size diamond tool using a focused ion beam. / Ding, X; Lim, G C; Cheng, C K; Butler, David Lee; Shaw, K C; Liu, K; Fong, W S.

In: Journal of Micromechanics and Microengineering, Vol. 18, No. 7, 075017, 09.06.2008.

Research output: Contribution to journalArticle

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AU - Fong, W S

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