Fabrication of a micro-size diamond tool using a focused ion beam

X Ding; G C Lim; C K Cheng; David Lee Butler; K C Shaw; K Liu; W S Fong

doi:10.1088/0960-1317/18/7/075017

Fabrication of a micro-size diamond tool using a focused ion beam

X Ding, G C Lim, C K Cheng, David Lee Butler, K C Shaw, K Liu, W S Fong

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.

Original language	English
Article number	075017
Number of pages	10
Journal	Journal of Micromechanics and Microengineering
Volume	18
Issue number	7
DOIs	https://doi.org/10.1088/0960-1317/18/7/075017
Publication status	Published - 9 Jun 2008
Externally published	Yes

Keywords

cutting tools
focused ion beam
diamond block

Access to Document

10.1088/0960-1317/18/7/075017

Cite this

@article{6e13f2b3419b4cafb9c5053b3cd74cce,

title = "Fabrication of a micro-size diamond tool using a focused ion beam",

abstract = "An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.",

keywords = "cutting tools, focused ion beam, diamond block",

author = "X Ding and Lim, {G C} and Cheng, {C K} and Butler, {David Lee} and Shaw, {K C} and K Liu and Fong, {W S}",

year = "2008",

month = jun,

day = "9",

doi = "10.1088/0960-1317/18/7/075017",

language = "English",

volume = "18",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

number = "7",

}

TY - JOUR

T1 - Fabrication of a micro-size diamond tool using a focused ion beam

AU - Ding, X

AU - Lim, G C

AU - Cheng, C K

AU - Butler, David Lee

AU - Shaw, K C

AU - Liu, K

AU - Fong, W S

PY - 2008/6/9

Y1 - 2008/6/9

N2 - An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.

AB - An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.

KW - cutting tools

KW - focused ion beam

KW - diamond block

UR - http://www.scopus.com/inward/record.url?scp=47249105145&partnerID=8YFLogxK

UR - http://iopscience.iop.org/journal/0960-1317

U2 - 10.1088/0960-1317/18/7/075017

DO - 10.1088/0960-1317/18/7/075017

M3 - Article

AN - SCOPUS:47249105145

VL - 18

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 7

M1 - 075017

ER -

Fabrication of a micro-size diamond tool using a focused ion beam

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this