Fabrication and tuning of nanoscale metallic ring and split-ring arrays

A.K. Sheridan, A.W. Clark, A. Glidle, J.M. Cooper, D.R.S. Cumming

Research output: Contribution to journalArticle

Abstract

Metallic structures with dimensions smaller than the wavelength of light demonstrate optical properties which depend strongly on the nanoparticle size, shape, and interparticle spacing. The optical properties are caused by the excitation of localized surface plasmon resonances that lead to strong enhancement and confinement of the optical field and can be exploited for many applications including surface-enhanced Raman spectroscopy, near-field scanning optical microscopy, and negative refractive index materials. In order to fully exploit the properties of these structures, both a highly reproducible and flexible fabrication technique and an in-depth understanding of the optical properties are needed. In this article, the authors demonstrate the fabrication of arrays of gold rings and split rings on glass using electron beam lithography. Electron beam lithography allows not only precise control of the size, shape, and spacing of the arrays but also the scope to design novel shapes at will. We characterize these arrays using polarization dependent spectroscopy. The structures can support multiple plasmon resonances, demonstrating that excellent uniformity across the array is achieved. These resonances are further characterized using a finite difference time domain method to model the electric field distribution around the ring structures.
LanguageEnglish
Pages2628-2631
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume25
Issue number6
DOIs
Publication statusPublished - Nov 2007

Fingerprint

Optical properties
Electron beam lithography
Tuning
tuning
Fabrication
fabrication
rings
optical properties
Near field scanning optical microscopy
lithography
Finite difference time domain method
spacing
Surface plasmon resonance
electron beams
Raman spectroscopy
Refractive index
ring structures
Gold
Electric fields
surface plasmon resonance

Keywords

  • nanoscale metallic ring
  • split-ring arrays

Cite this

Sheridan, A.K. ; Clark, A.W. ; Glidle, A. ; Cooper, J.M. ; Cumming, D.R.S. / Fabrication and tuning of nanoscale metallic ring and split-ring arrays. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2007 ; Vol. 25, No. 6. pp. 2628-2631.
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Fabrication and tuning of nanoscale metallic ring and split-ring arrays. / Sheridan, A.K.; Clark, A.W.; Glidle, A.; Cooper, J.M.; Cumming, D.R.S.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 25, No. 6, 11.2007, p. 2628-2631.

Research output: Contribution to journalArticle

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T1 - Fabrication and tuning of nanoscale metallic ring and split-ring arrays

AU - Sheridan, A.K.

AU - Clark, A.W.

AU - Glidle, A.

AU - Cooper, J.M.

AU - Cumming, D.R.S.

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AB - Metallic structures with dimensions smaller than the wavelength of light demonstrate optical properties which depend strongly on the nanoparticle size, shape, and interparticle spacing. The optical properties are caused by the excitation of localized surface plasmon resonances that lead to strong enhancement and confinement of the optical field and can be exploited for many applications including surface-enhanced Raman spectroscopy, near-field scanning optical microscopy, and negative refractive index materials. In order to fully exploit the properties of these structures, both a highly reproducible and flexible fabrication technique and an in-depth understanding of the optical properties are needed. In this article, the authors demonstrate the fabrication of arrays of gold rings and split rings on glass using electron beam lithography. Electron beam lithography allows not only precise control of the size, shape, and spacing of the arrays but also the scope to design novel shapes at will. We characterize these arrays using polarization dependent spectroscopy. The structures can support multiple plasmon resonances, demonstrating that excellent uniformity across the array is achieved. These resonances are further characterized using a finite difference time domain method to model the electric field distribution around the ring structures.

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