Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays

C.W. Jeon; H.W. Choi; M.D. Dawson

doi:10.1109/LEOS.2003.1253082

Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays

C.W. Jeon, H.W. Choi, M.D. Dawson

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

The main task involved in the development of micro-LED arrays relates to the electrical contacting and interconnection of each individual pixel. Planarization has been a common solution employed to level out uneven topologies. The fabrication and performance of GaN-based micro-light emitting diode (μm-LED) arrays with 64×64 elements, with emission at the wavelengths of 510nm (green) and 370nm (near-UV), are reported. It is clear that each individual pixel is well resolved and there is no significant optical cross-talk. We will report fully on these devices, and also on 128×96 arrays at both wavelengths which are currently in development.

Original language	English
Title of host publication	LEOS 2003: 16th Annual meeting of the IEEE Lasers & Electro-Optics Society
Publisher	IEEE
Pages	878-879
Number of pages	1
Volume	2
ISBN (Print)	0-7803-7888-1
DOIs	https://doi.org/10.1109/LEOS.2003.1253082
Publication status	Published - 28 Oct 2003

Keywords

gallium compounds
light emitting diodes
LED
micro-optics
optical arrays
optical fabrication
visible spectra

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10.1109/LEOS.2003.1253082

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@inbook{cd040739eb3a4dc8bf738712bce22c58,

title = "Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays",

abstract = "The main task involved in the development of micro-LED arrays relates to the electrical contacting and interconnection of each individual pixel. Planarization has been a common solution employed to level out uneven topologies. The fabrication and performance of GaN-based micro-light emitting diode (μm-LED) arrays with 64×64 elements, with emission at the wavelengths of 510nm (green) and 370nm (near-UV), are reported. It is clear that each individual pixel is well resolved and there is no significant optical cross-talk. We will report fully on these devices, and also on 128×96 arrays at both wavelengths which are currently in development.",

keywords = "gallium compounds, light emitting diodes, LED, micro-optics, optical arrays, optical fabrication, visible spectra",

author = "C.W. Jeon and H.W. Choi and M.D. Dawson",

note = "Book title field check required",

year = "2003",

month = oct,

day = "28",

doi = "10.1109/LEOS.2003.1253082",

language = "English",

isbn = "0-7803-7888-1",

volume = "2",

pages = "878--879",

booktitle = "LEOS 2003: 16th Annual meeting of the IEEE Lasers & Electro-Optics Society",

publisher = "IEEE",

}

TY - CHAP

T1 - Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays

AU - Jeon, C.W.

AU - Choi, H.W.

AU - Dawson, M.D.

N1 - Book title field check required

PY - 2003/10/28

Y1 - 2003/10/28

N2 - The main task involved in the development of micro-LED arrays relates to the electrical contacting and interconnection of each individual pixel. Planarization has been a common solution employed to level out uneven topologies. The fabrication and performance of GaN-based micro-light emitting diode (μm-LED) arrays with 64×64 elements, with emission at the wavelengths of 510nm (green) and 370nm (near-UV), are reported. It is clear that each individual pixel is well resolved and there is no significant optical cross-talk. We will report fully on these devices, and also on 128×96 arrays at both wavelengths which are currently in development.

AB - The main task involved in the development of micro-LED arrays relates to the electrical contacting and interconnection of each individual pixel. Planarization has been a common solution employed to level out uneven topologies. The fabrication and performance of GaN-based micro-light emitting diode (μm-LED) arrays with 64×64 elements, with emission at the wavelengths of 510nm (green) and 370nm (near-UV), are reported. It is clear that each individual pixel is well resolved and there is no significant optical cross-talk. We will report fully on these devices, and also on 128×96 arrays at both wavelengths which are currently in development.

KW - gallium compounds

KW - light emitting diodes

KW - LED

KW - micro-optics

KW - optical arrays

KW - optical fabrication

KW - visible spectra

UR - http://dx.doi.org/10.1109/LEOS.2003.1253082

U2 - 10.1109/LEOS.2003.1253082

DO - 10.1109/LEOS.2003.1253082

M3 - Chapter

SN - 0-7803-7888-1

VL - 2

SP - 878

EP - 879

BT - LEOS 2003: 16th Annual meeting of the IEEE Lasers & Electro-Optics Society

PB - IEEE

ER -

Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays

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Keywords

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