Fabrication and evaluation of GaN negative and bifocal microlenses

H.W. Choi, E. Gu, C. Liu, J.M. Girkin, M.D. Dawson

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Methods of fabricating negative and bifocal microlens arrays have been demonstrated in this paper. The technique of photoresist molding using a sapphire positive lens template was used for the patterning of negative microlenses, while the bifocal microlens arrays were fabricated using a two-step etch process. In both cases, the lenses were etched using inductively coupled plasma. Microlenses with diameters as small as 10 µm have been demonstrated and were characterized using atomic force microscopy and confocal microscopy. The lens arrays were found to be smooth, uniform, and to have focal lengths consistent with their design and calculated values.
LanguageEnglish
JournalJournal of Applied Physics
Volume97
Issue number063101
DOIs
Publication statusPublished - 2005

Fingerprint

lenses
fabrication
evaluation
photoresists
sapphire
templates
atomic force microscopy
microscopy

Keywords

  • gallium compounds
  • semiconductor epitaxial layers
  • microlenses
  • micromechanical devices
  • optical fabrication
  • optical arrays
  • atomic force microscopy
  • photonics
  • optics

Cite this

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title = "Fabrication and evaluation of GaN negative and bifocal microlenses",
abstract = "Methods of fabricating negative and bifocal microlens arrays have been demonstrated in this paper. The technique of photoresist molding using a sapphire positive lens template was used for the patterning of negative microlenses, while the bifocal microlens arrays were fabricated using a two-step etch process. In both cases, the lenses were etched using inductively coupled plasma. Microlenses with diameters as small as 10 µm have been demonstrated and were characterized using atomic force microscopy and confocal microscopy. The lens arrays were found to be smooth, uniform, and to have focal lengths consistent with their design and calculated values.",
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Fabrication and evaluation of GaN negative and bifocal microlenses. / Choi, H.W.; Gu, E.; Liu, C.; Girkin, J.M.; Dawson, M.D.

In: Journal of Applied Physics, Vol. 97, No. 063101, 2005.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Fabrication and evaluation of GaN negative and bifocal microlenses

AU - Choi, H.W.

AU - Gu, E.

AU - Liu, C.

AU - Girkin, J.M.

AU - Dawson, M.D.

PY - 2005

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AB - Methods of fabricating negative and bifocal microlens arrays have been demonstrated in this paper. The technique of photoresist molding using a sapphire positive lens template was used for the patterning of negative microlenses, while the bifocal microlens arrays were fabricated using a two-step etch process. In both cases, the lenses were etched using inductively coupled plasma. Microlenses with diameters as small as 10 µm have been demonstrated and were characterized using atomic force microscopy and confocal microscopy. The lens arrays were found to be smooth, uniform, and to have focal lengths consistent with their design and calculated values.

KW - gallium compounds

KW - semiconductor epitaxial layers

KW - microlenses

KW - micromechanical devices

KW - optical fabrication

KW - optical arrays

KW - atomic force microscopy

KW - photonics

KW - optics

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