External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

S.P. Poland; J.M. Girkin; L. Li; D.G. Uttamchandani

doi:10.1049/mnl.2009.0018

External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

S.P. Poland, J.M. Girkin, L. Li, D.G. Uttamchandani

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.

Original language	English
Pages (from-to)	106-111
Number of pages	5
Journal	Micro and Nano Letters
Volume	4
Issue number	2
DOIs	https://doi.org/10.1049/mnl.2009.0018
Publication status	Published - 2009

Keywords

external linearisation
compensatory mapping technique
MEMS electrothermal actuated optical scanner
two-axis MEMS scanner
confocal optical microscope configuration
lookup-table
random search algorithm
linearisation techniques
micromechanical devices
optical microscopes
optical scanners
random processes

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10.1049/mnl.2009.0018

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title = "External linearisation of a MEMS electrothermal scanner with application in a confocal microscope",

abstract = "A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.",

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author = "S.P. Poland and J.M. Girkin and L. Li and D.G. Uttamchandani",

year = "2009",

doi = "10.1049/mnl.2009.0018",

language = "English",

volume = "4",

pages = "106--111",

journal = "Micro and Nano Letters",

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T1 - External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

AU - Poland, S.P.

AU - Girkin, J.M.

AU - Li, L.

AU - Uttamchandani, D.G.

PY - 2009

Y1 - 2009

N2 - A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.

AB - A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.

KW - external linearisation

KW - compensatory mapping technique

KW - MEMS electrothermal actuated optical scanner

KW - two-axis MEMS scanner

KW - confocal optical microscope configuration

KW - lookup-table

KW - random search algorithm

KW - linearisation techniques

KW - micromechanical devices

KW - optical microscopes

KW - optical scanners

KW - random processes

UR - http://dx.doi.org/10.1049/mnl.2009.0018

U2 - 10.1049/mnl.2009.0018

DO - 10.1049/mnl.2009.0018

M3 - Article

VL - 4

SP - 106

EP - 111

JO - Micro and Nano Letters

JF - Micro and Nano Letters

SN - 1750-0443

IS - 2

ER -

External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

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Keywords

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