Abstract
A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.
Original language | English |
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Pages (from-to) | 106-111 |
Number of pages | 5 |
Journal | Micro and Nano Letters |
Volume | 4 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2009 |
Keywords
- external linearisation
- compensatory mapping technique
- MEMS electrothermal actuated optical scanner
- two-axis MEMS scanner
- confocal optical microscope configuration
- lookup-table
- random search algorithm
- linearisation techniques
- micromechanical devices
- optical microscopes
- optical scanners
- random processes