External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

S.P. Poland, J.M. Girkin, L. Li, D.G. Uttamchandani

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.
Original languageEnglish
Pages (from-to)106-111
Number of pages5
JournalMicro and Nano Letters
Volume4
Issue number2
DOIs
Publication statusPublished - 2009

Keywords

  • external linearisation
  • compensatory mapping technique
  • MEMS electrothermal actuated optical scanner
  • two-axis MEMS scanner
  • confocal optical microscope configuration
  • lookup-table
  • random search algorithm
  • linearisation techniques
  • micromechanical devices
  • optical microscopes
  • optical scanners
  • random processes

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