Abstract
A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.
| Original language | English |
|---|---|
| Pages (from-to) | 106-111 |
| Number of pages | 5 |
| Journal | Micro and Nano Letters |
| Volume | 4 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2009 |
Keywords
- external linearisation
- compensatory mapping technique
- MEMS electrothermal actuated optical scanner
- two-axis MEMS scanner
- confocal optical microscope configuration
- lookup-table
- random search algorithm
- linearisation techniques
- micromechanical devices
- optical microscopes
- optical scanners
- random processes
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Poland, S. P., Girkin, J. M., Li, L., & Uttamchandani, D. G. (2009). External linearisation of a MEMS electrothermal scanner with application in a confocal microscope. Micro and Nano Letters, 4(2), 106-111. https://doi.org/10.1049/mnl.2009.0018