Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma

C.L. Lee, E. Gu, M.D. Dawson, I. Friel, G.A. Scarbrook

Research output: Contribution to conferencePaper

Abstract

This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.
Original languageEnglish
Publication statusUnpublished - 12 Sep 2007
Event18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides - Berlin, Germany
Duration: 9 Sep 200714 Sep 2007

Conference

Conference18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides
CityBerlin, Germany
Period9/09/0714/09/07

Keywords

  • micro-optics fabrication
  • diamond
  • chlorine inductively-coupled plasma

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