Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma

C.L. Lee, E. Gu, M.D. Dawson, I. Friel, G.A. Scarbrook

Research output: Contribution to conferencePaper

Abstract

This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.

Conference

Conference18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides
CityBerlin, Germany
Period9/09/0714/09/07

Fingerprint

chlorine
diamonds
etching
optics
fabrication
carbon nitrides
carbon nanotubes

Keywords

  • micro-optics fabrication
  • diamond
  • chlorine inductively-coupled plasma

Cite this

Lee, C. L., Gu, E., Dawson, M. D., Friel, I., & Scarbrook, G. A. (2007). Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. Paper presented at 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, Berlin, Germany, .
Lee, C.L. ; Gu, E. ; Dawson, M.D. ; Friel, I. ; Scarbrook, G.A. / Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. Paper presented at 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, Berlin, Germany, .
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title = "Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma",
abstract = "This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.",
keywords = "micro-optics fabrication, diamond, chlorine inductively-coupled plasma",
author = "C.L. Lee and E. Gu and M.D. Dawson and I. Friel and G.A. Scarbrook",
note = "Also available as a journal article at http://strathprints.strath.ac.uk/13999/; 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides ; Conference date: 09-09-2007 Through 14-09-2007",
year = "2007",
month = "9",
day = "12",
language = "English",

}

Lee, CL, Gu, E, Dawson, MD, Friel, I & Scarbrook, GA 2007, 'Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma' Paper presented at 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, Berlin, Germany, 9/09/07 - 14/09/07, .

Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. / Lee, C.L.; Gu, E.; Dawson, M.D.; Friel, I.; Scarbrook, G.A.

2007. Paper presented at 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, Berlin, Germany, .

Research output: Contribution to conferencePaper

TY - CONF

T1 - Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma

AU - Lee, C.L.

AU - Gu, E.

AU - Dawson, M.D.

AU - Friel, I.

AU - Scarbrook, G.A.

N1 - Also available as a journal article at http://strathprints.strath.ac.uk/13999/

PY - 2007/9/12

Y1 - 2007/9/12

N2 - This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.

AB - This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.

KW - micro-optics fabrication

KW - diamond

KW - chlorine inductively-coupled plasma

UR - http://www.diamond-conference.elsevier.com/oral.htm#s1

M3 - Paper

ER -

Lee CL, Gu E, Dawson MD, Friel I, Scarbrook GA. Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. 2007. Paper presented at 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, Berlin, Germany, .