Environmentally benign material removal processes for the fabrication of microdevices

Steven Danyluk, Travis Lee Blackburn, David Butler, Leo Cheng Seng

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

1 Citation (Scopus)

Abstract

Non-contact material removal processes offer numerous advantages over traditional machining approaches and nowhere is this more apparent than in the fabrication of micro devices. Current micromachining techniques such as microgrinding and micromilling have limitations with respect to their positioning accuracy and tool deflections. Electro thermal processes such as microEDM and laser machining usually result in a heat affected zone being produced. Other approaches such as etching and non-contact ultraprecision polishing are either costly or are not suitable for high throughput. In order to address these limitations, alternative micromachining techniques are required. In this paper, a non-contact material removal technique based on the electrokinetic phenomenon is proposed for precise material removal at rates in the order of nanometers/min. The aim of this research is to have a better understanding on the electrokinetic material removal technique by studying the trajectory of the particles and the influence of the frequency of the electric field on the material removal rate.
Original languageEnglish
Title of host publication10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009
Place of PublicationEnfield, NH
Pages451-456
Number of pages6
Volume620-622
DOIs
Publication statusPublished - 30 Apr 2009
Externally publishedYes
Event10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009 - Xian, China
Duration: 13 Jan 200915 Jan 2009

Publication series

NameMaterials Science Forum
Volume620-622
ISSN (Print)0255-5476

Conference

Conference10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009
CountryChina
CityXian
Period13/01/0915/01/09

Keywords

  • micromachining
  • micro fabrication
  • electrokinetics

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  • Cite this

    Danyluk, S., Blackburn, T. L., Butler, D., & Seng, L. C. (2009). Environmentally benign material removal processes for the fabrication of microdevices. In 10th International Symposium on Eco-Materials Processing and Design, ISEPD 2009 (Vol. 620-622, pp. 451-456). (Materials Science Forum; Vol. 620-622).. https://doi.org/10.4028/www.scientific.net/MSF.620-622.451