Electrophotographic patterning of thin-film circuits

Helena Gleskova (Inventor), D. Shen (Inventor), S. Wagner (Inventor)

Research output: Patent

Abstract

Amorphous silicon thin-film transistors on glass foil are made using exclusively electrophotographic printing for pattern formation, contact hole opening, and device isolation. Toner etch masks are applied by feeding the glass substrate through a laser printer or photocopier, or from laser-printed patterns on transfer paper. This all-printed patterning is a low-cost, large-area circuit processing technology, suitable for producing backplanes for active matrix liquid crystal displays.

LanguageEnglish
Patent numberUS6080606
Publication statusPublished - 27 Jun 2000

Fingerprint

Thin film circuits
Glass
Lasers
Thin film transistors
Amorphous silicon
Liquid crystal displays
Metal foil
Printing
Masks
Networks (circuits)
Substrates
Processing
Costs

Keywords

  • electrophotographic patterning
  • thin-film circuits

Cite this

Gleskova, H., Shen, D., & Wagner, S. (2000). Electrophotographic patterning of thin-film circuits. (Patent No. US6080606).
Gleskova, Helena (Inventor) ; Shen, D. (Inventor) ; Wagner, S. (Inventor). / Electrophotographic patterning of thin-film circuits. Patent No.: US6080606.
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Gleskova, H, Shen, D & Wagner, S 2000, Electrophotographic patterning of thin-film circuits, Patent No. US6080606.

Electrophotographic patterning of thin-film circuits. / Gleskova, Helena (Inventor); Shen, D. (Inventor); Wagner, S. (Inventor).

Patent No.: US6080606.

Research output: Patent

TY - PAT

T1 - Electrophotographic patterning of thin-film circuits

AU - Gleskova, Helena

AU - Shen, D.

AU - Wagner, S.

PY - 2000/6/27

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N2 - Amorphous silicon thin-film transistors on glass foil are made using exclusively electrophotographic printing for pattern formation, contact hole opening, and device isolation. Toner etch masks are applied by feeding the glass substrate through a laser printer or photocopier, or from laser-printed patterns on transfer paper. This all-printed patterning is a low-cost, large-area circuit processing technology, suitable for producing backplanes for active matrix liquid crystal displays.

AB - Amorphous silicon thin-film transistors on glass foil are made using exclusively electrophotographic printing for pattern formation, contact hole opening, and device isolation. Toner etch masks are applied by feeding the glass substrate through a laser printer or photocopier, or from laser-printed patterns on transfer paper. This all-printed patterning is a low-cost, large-area circuit processing technology, suitable for producing backplanes for active matrix liquid crystal displays.

KW - electrophotographic patterning

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Gleskova H, Shen D, Wagner S, inventors. Electrophotographic patterning of thin-film circuits. US6080606. 2000 Jun 27.