Electrical stability of a-Si:H TFTs fabricated at 150ºC

Helena Gleskova, S. Wagner

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

This chapter looks at electrical stability of a-Si:H TFTs fabricated at 150ºC
LanguageEnglish
Title of host publicationAmorphous and heterogeneous silicon-based films – 2001
Subtitle of host publicationvolume 664 - MRS proceedings
EditorsM. Stutzmann, J. B. Boyce, J. D. Cohen, R. W. Collins, J. Hanna
Place of PublicationWarrendale, PA
PagesA19.7.1-A19.7.6
Number of pages6
Volume664
Publication statusPublished - 15 Oct 2001
EventMRS Spring Meeting 2001 - San Francisco, United States
Duration: 16 Apr 200120 Apr 2001

Publication series

NameMRS Symposium Proceedings
PublisherMaterials Research Society
Volume664

Conference

ConferenceMRS Spring Meeting 2001
CountryUnited States
CitySan Francisco
Period16/04/0120/04/01

Keywords

  • electrical stability
  • si:h tft
  • fabricated
  • 150-degrees-C

Cite this

Gleskova, H., & Wagner, S. (2001). Electrical stability of a-Si:H TFTs fabricated at 150ºC. In M. Stutzmann, J. B. Boyce, J. D. Cohen, R. W. Collins, & J. Hanna (Eds.), Amorphous and heterogeneous silicon-based films – 2001: volume 664 - MRS proceedings (Vol. 664, pp. A19.7.1-A19.7.6). (MRS Symposium Proceedings; Vol. 664). Warrendale, PA.
Gleskova, Helena ; Wagner, S. / Electrical stability of a-Si:H TFTs fabricated at 150ºC. Amorphous and heterogeneous silicon-based films – 2001: volume 664 - MRS proceedings. editor / M. Stutzmann ; J. B. Boyce ; J. D. Cohen ; R. W. Collins ; J. Hanna. Vol. 664 Warrendale, PA, 2001. pp. A19.7.1-A19.7.6 (MRS Symposium Proceedings).
@inproceedings{917aaf278095410984a5b7c4d14e1f22,
title = "Electrical stability of a-Si:H TFTs fabricated at 150ºC",
abstract = "This chapter looks at electrical stability of a-Si:H TFTs fabricated at 150ºC",
keywords = "electrical stability, si:h tft , fabricated, 150-degrees-C",
author = "Helena Gleskova and S. Wagner",
year = "2001",
month = "10",
day = "15",
language = "English",
isbn = "9781558996007",
volume = "664",
series = "MRS Symposium Proceedings",
publisher = "Materials Research Society",
pages = "A19.7.1--A19.7.6",
editor = "M. Stutzmann and Boyce, {J. B.} and Cohen, {J. D.} and Collins, {R. W.} and J. Hanna",
booktitle = "Amorphous and heterogeneous silicon-based films – 2001",

}

Gleskova, H & Wagner, S 2001, Electrical stability of a-Si:H TFTs fabricated at 150ºC. in M Stutzmann, JB Boyce, JD Cohen, RW Collins & J Hanna (eds), Amorphous and heterogeneous silicon-based films – 2001: volume 664 - MRS proceedings. vol. 664, MRS Symposium Proceedings, vol. 664, Warrendale, PA, pp. A19.7.1-A19.7.6, MRS Spring Meeting 2001, San Francisco, United States, 16/04/01.

Electrical stability of a-Si:H TFTs fabricated at 150ºC. / Gleskova, Helena; Wagner, S.

Amorphous and heterogeneous silicon-based films – 2001: volume 664 - MRS proceedings. ed. / M. Stutzmann; J. B. Boyce; J. D. Cohen; R. W. Collins; J. Hanna. Vol. 664 Warrendale, PA, 2001. p. A19.7.1-A19.7.6 (MRS Symposium Proceedings; Vol. 664).

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - Electrical stability of a-Si:H TFTs fabricated at 150ºC

AU - Gleskova, Helena

AU - Wagner, S.

PY - 2001/10/15

Y1 - 2001/10/15

N2 - This chapter looks at electrical stability of a-Si:H TFTs fabricated at 150ºC

AB - This chapter looks at electrical stability of a-Si:H TFTs fabricated at 150ºC

KW - electrical stability

KW - si:h tft

KW - fabricated

KW - 150-degrees-C

M3 - Conference contribution book

SN - 9781558996007

VL - 664

T3 - MRS Symposium Proceedings

SP - A19.7.1-A19.7.6

BT - Amorphous and heterogeneous silicon-based films – 2001

A2 - Stutzmann, M.

A2 - Boyce, J. B.

A2 - Cohen, J. D.

A2 - Collins, R. W.

A2 - Hanna, J.

CY - Warrendale, PA

ER -

Gleskova H, Wagner S. Electrical stability of a-Si:H TFTs fabricated at 150ºC. In Stutzmann M, Boyce JB, Cohen JD, Collins RW, Hanna J, editors, Amorphous and heterogeneous silicon-based films – 2001: volume 664 - MRS proceedings. Vol. 664. Warrendale, PA. 2001. p. A19.7.1-A19.7.6. (MRS Symposium Proceedings).