Efficient GaN-based micro-LED arrays

H.W. Choi, C.W. Jeon, M.D. Dawson, P.R. Edwards, R.W. Martin, Christian Wetzel (Editor), Edward T. Yu (Editor), James S. Speck (Editor), Angela Rizzi (Editor), Yasuhiko Arakawa (Editor)

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)

Abstract

Highly efficient, two-dimensional arrays of parallel-addressed InGaN blue micro-LEDs with individual element diameters of 8, 12 and 20microns have been fabricated. In order to overcome the difficulty of interconnecting multiple device elements with sufficient step-height coverage for contact metallisation, a novel scheme involving the etching of sloped-sidewalls has been developed. The devices have I-V characteristics similar to those of broad-area reference LEDs fabricated from the same wafer, and give superior (3mW) light output in the forward direction to the reference LEDs, despite much lower active area. The external efficiencies of the micro-LED arrays improve as the dimensions of the individual elements are scaled down. This is attributed to scattering at the etched sidewalls of in-plane propagating photons into the forward direction.
LanguageEnglish
Title of host publicationProceedings of the 2002 MRS Fall Meeting
Pages433-438
Number of pages5
VolumeSymposium L
Edition743
Publication statusPublished - 2002

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light emitting diodes
electric contacts
etching
wafers
output
photons
scattering

Keywords

  • InGaN
  • blue micro-LED
  • fabrication
  • efficiencies

Cite this

Choi, H. W., Jeon, C. W., Dawson, M. D., Edwards, P. R., Martin, R. W., Wetzel, C. (Ed.), ... Arakawa, Y. (Ed.) (2002). Efficient GaN-based micro-LED arrays. In Proceedings of the 2002 MRS Fall Meeting (743 ed., Vol. Symposium L, pp. 433-438)
Choi, H.W. ; Jeon, C.W. ; Dawson, M.D. ; Edwards, P.R. ; Martin, R.W. ; Wetzel, Christian (Editor) ; Yu, Edward T. (Editor) ; Speck, James S. (Editor) ; Rizzi, Angela (Editor) ; Arakawa, Yasuhiko (Editor). / Efficient GaN-based micro-LED arrays. Proceedings of the 2002 MRS Fall Meeting. Vol. Symposium L 743. ed. 2002. pp. 433-438
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Choi, HW, Jeon, CW, Dawson, MD, Edwards, PR, Martin, RW, Wetzel, C (ed.), Yu, ET (ed.), Speck, JS (ed.), Rizzi, A (ed.) & Arakawa, Y (ed.) 2002, Efficient GaN-based micro-LED arrays. in Proceedings of the 2002 MRS Fall Meeting. 743 edn, vol. Symposium L, pp. 433-438.

Efficient GaN-based micro-LED arrays. / Choi, H.W.; Jeon, C.W.; Dawson, M.D.; Edwards, P.R.; Martin, R.W.; Wetzel, Christian (Editor); Yu, Edward T. (Editor); Speck, James S. (Editor); Rizzi, Angela (Editor); Arakawa, Yasuhiko (Editor).

Proceedings of the 2002 MRS Fall Meeting. Vol. Symposium L 743. ed. 2002. p. 433-438.

Research output: Chapter in Book/Report/Conference proceedingChapter

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AU - Choi, H.W.

AU - Jeon, C.W.

AU - Dawson, M.D.

AU - Edwards, P.R.

AU - Martin, R.W.

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A2 - Yu, Edward T.

A2 - Speck, James S.

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A2 - Arakawa, Yasuhiko

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AB - Highly efficient, two-dimensional arrays of parallel-addressed InGaN blue micro-LEDs with individual element diameters of 8, 12 and 20microns have been fabricated. In order to overcome the difficulty of interconnecting multiple device elements with sufficient step-height coverage for contact metallisation, a novel scheme involving the etching of sloped-sidewalls has been developed. The devices have I-V characteristics similar to those of broad-area reference LEDs fabricated from the same wafer, and give superior (3mW) light output in the forward direction to the reference LEDs, despite much lower active area. The external efficiencies of the micro-LED arrays improve as the dimensions of the individual elements are scaled down. This is attributed to scattering at the etched sidewalls of in-plane propagating photons into the forward direction.

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KW - fabrication

KW - efficiencies

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Choi HW, Jeon CW, Dawson MD, Edwards PR, Martin RW, Wetzel C, (ed.) et al. Efficient GaN-based micro-LED arrays. In Proceedings of the 2002 MRS Fall Meeting. 743 ed. Vol. Symposium L. 2002. p. 433-438