Abstract
| Language | English |
|---|---|
| Title of host publication | Amorphous and heterogeneous silicon-based films – 2002 |
| Subtitle of host publication | volume 715 - MRS proceedings |
| Editors | J. D. Cohen, J. R. Abelson, H. Matsumura, J. Robertson |
| Place of Publication | Warrendale, PA |
| Pages | A3.4.1-A3.4.11 |
| Number of pages | 11 |
| Volume | 715 |
| Publication status | Published - 2002 |
| Event | 2002 MRS Spring Meeting & Exhibit - Moscone West Convention Center, San Francisco, United States Duration: 1 Apr 2002 → 5 Apr 2002 http://www.mrs.org/spring2002/ |
Publication series
| Name | MRS Symposium Proceedings |
|---|---|
| Publisher | Materials Research Society |
| Volume | 715 |
Conference
| Conference | 2002 MRS Spring Meeting & Exhibit |
|---|---|
| Country | United States |
| City | San Francisco |
| Period | 1/04/02 → 5/04/02 |
| Other | The 2002 MRS Spring Meeting was held in San Francisco's Moscone West Convention Center. 24 technical symposia, grouped into six broad topical clusters, were held. |
| Internet address |
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Keywords
- effects
- mechanical strain
- amorphous
- silicon thin film transistors
Cite this
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Effects of mechanical strain on amorphous silicon thin-film transistors. / Gleskova, H.; Wagner, S.; Soboyejo, W.; Suo, Z.
Amorphous and heterogeneous silicon-based films – 2002 : volume 715 - MRS proceedings. ed. / J. D. Cohen; J. R. Abelson; H. Matsumura; J. Robertson. Vol. 715 Warrendale, PA , 2002. p. A3.4.1-A3.4.11 (MRS Symposium Proceedings; Vol. 715).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book
TY - GEN
T1 - Effects of mechanical strain on amorphous silicon thin-film transistors
AU - Gleskova, H.
AU - Wagner, S.
AU - Soboyejo, W.
AU - Suo, Z.
N1 - Invited talk
PY - 2002
Y1 - 2002
N2 - This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors
AB - This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors
KW - effects
KW - mechanical strain
KW - amorphous
KW - silicon thin film transistors
M3 - Conference contribution book
SN - 9781558996519
VL - 715
T3 - MRS Symposium Proceedings
SP - A3.4.1-A3.4.11
BT - Amorphous and heterogeneous silicon-based films – 2002
A2 - Cohen, J. D.
A2 - Abelson, J. R.
A2 - Matsumura, H.
A2 - Robertson, J.
CY - Warrendale, PA
ER -