Effects of mechanical strain on amorphous silicon thin-film transistors

H. Gleskova; S. Wagner; W. Soboyejo; Z. Suo

Effects of mechanical strain on amorphous silicon thin-film transistors

H. Gleskova, S. Wagner, W. Soboyejo, Z. Suo

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

7 Citations (Scopus)

Abstract

This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors

Original language	English
Title of host publication	Amorphous and heterogeneous silicon-based films – 2002
Subtitle of host publication	volume 715 - MRS proceedings
Editors	J. D. Cohen, J. R. Abelson, H. Matsumura, J. Robertson
Place of Publication	Warrendale, PA
Pages	A3.4.1-A3.4.11
Number of pages	11
Volume	715
Publication status	Published - 2002
Event	2002 MRS Spring Meeting & Exhibit - Moscone West Convention Center, San Francisco, United States Duration: 1 Apr 2002 → 5 Apr 2002 http://www.mrs.org/spring2002/

Publication series

Name	MRS Symposium Proceedings
Publisher	Materials Research Society
Volume	715

Conference

Conference	2002 MRS Spring Meeting & Exhibit
Country	United States
City	San Francisco
Period	1/04/02 → 5/04/02
Other	The 2002 MRS Spring Meeting was held in San Francisco's Moscone West Convention Center. 24 technical symposia, grouped into six broad topical clusters, were held.
Internet address	http://www.mrs.org/spring2002/

Keywords

effects
mechanical strain
amorphous
silicon thin film transistors

Cite this

@inproceedings{fea825c96342495996f6fe5a82fa9551,

title = "Effects of mechanical strain on amorphous silicon thin-film transistors",

abstract = "This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors",

keywords = "effects, mechanical strain, amorphous, silicon thin film transistors",

author = "H. Gleskova and S. Wagner and W. Soboyejo and Z. Suo",

note = "Invited talk; 2002 MRS Spring Meeting & Exhibit ; Conference date: 01-04-2002 Through 05-04-2002",

year = "2002",

language = "English",

isbn = "9781558996519",

volume = "715",

series = "MRS Symposium Proceedings",

publisher = "Materials Research Society",

pages = "A3.4.1--A3.4.11",

editor = "Cohen, {J. D.} and Abelson, {J. R.} and H. Matsumura and J. Robertson",

booktitle = "Amorphous and heterogeneous silicon-based films – 2002",

url = "http://www.mrs.org/spring2002/",

}

Gleskova, H, Wagner, S, Soboyejo, W & Suo, Z 2002, Effects of mechanical strain on amorphous silicon thin-film transistors. in JD Cohen, JR Abelson, H Matsumura & J Robertson (eds), Amorphous and heterogeneous silicon-based films – 2002 : volume 715 - MRS proceedings. vol. 715, MRS Symposium Proceedings, vol. 715, Warrendale, PA , pp. A3.4.1-A3.4.11, 2002 MRS Spring Meeting & Exhibit, San Francisco, United States, 1/04/02.

Effects of mechanical strain on amorphous silicon thin-film transistors. / Gleskova, H.; Wagner, S.; Soboyejo, W.; Suo, Z.

Amorphous and heterogeneous silicon-based films – 2002 : volume 715 - MRS proceedings. ed. / J. D. Cohen; J. R. Abelson; H. Matsumura; J. Robertson. Vol. 715 Warrendale, PA , 2002. p. A3.4.1-A3.4.11 (MRS Symposium Proceedings; Vol. 715).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - Effects of mechanical strain on amorphous silicon thin-film transistors

AU - Gleskova, H.

AU - Wagner, S.

AU - Soboyejo, W.

AU - Suo, Z.

N1 - Invited talk

PY - 2002

Y1 - 2002

N2 - This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors

AB - This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors

KW - effects

KW - mechanical strain

KW - amorphous

KW - silicon thin film transistors

M3 - Conference contribution book

SN - 9781558996519

VL - 715

T3 - MRS Symposium Proceedings

SP - A3.4.1-A3.4.11

BT - Amorphous and heterogeneous silicon-based films – 2002

A2 - Cohen, J. D.

A2 - Abelson, J. R.

A2 - Matsumura, H.

A2 - Robertson, J.

CY - Warrendale, PA

T2 - 2002 MRS Spring Meeting & Exhibit

Y2 - 1 April 2002 through 5 April 2002

ER -