Effects of mechanical strain on amorphous silicon thin-film transistors

H. Gleskova, S. Wagner, W. Soboyejo, Z. Suo

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

7 Citations (Scopus)

Abstract

This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors
LanguageEnglish
Title of host publicationAmorphous and heterogeneous silicon-based films – 2002
Subtitle of host publicationvolume 715 - MRS proceedings
EditorsJ. D. Cohen, J. R. Abelson, H. Matsumura, J. Robertson
Place of PublicationWarrendale, PA
PagesA3.4.1-A3.4.11
Number of pages11
Volume715
Publication statusPublished - 2002
Event2002 MRS Spring Meeting & Exhibit - Moscone West Convention Center, San Francisco, United States
Duration: 1 Apr 20025 Apr 2002
http://www.mrs.org/spring2002/

Publication series

NameMRS Symposium Proceedings
PublisherMaterials Research Society
Volume715

Conference

Conference2002 MRS Spring Meeting & Exhibit
CountryUnited States
CitySan Francisco
Period1/04/025/04/02
OtherThe 2002 MRS Spring Meeting was held in San Francisco's Moscone West Convention Center. 24 technical symposia, grouped into six broad topical clusters, were held.
Internet address

Fingerprint

amorphous silicon
transistors
thin films

Keywords

  • effects
  • mechanical strain
  • amorphous
  • silicon thin film transistors

Cite this

Gleskova, H., Wagner, S., Soboyejo, W., & Suo, Z. (2002). Effects of mechanical strain on amorphous silicon thin-film transistors. In J. D. Cohen, J. R. Abelson, H. Matsumura, & J. Robertson (Eds.), Amorphous and heterogeneous silicon-based films – 2002 : volume 715 - MRS proceedings (Vol. 715, pp. A3.4.1-A3.4.11). (MRS Symposium Proceedings; Vol. 715). Warrendale, PA .
Gleskova, H. ; Wagner, S. ; Soboyejo, W. ; Suo, Z. / Effects of mechanical strain on amorphous silicon thin-film transistors. Amorphous and heterogeneous silicon-based films – 2002 : volume 715 - MRS proceedings. editor / J. D. Cohen ; J. R. Abelson ; H. Matsumura ; J. Robertson. Vol. 715 Warrendale, PA , 2002. pp. A3.4.1-A3.4.11 (MRS Symposium Proceedings).
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isbn = "9781558996519",
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Gleskova, H, Wagner, S, Soboyejo, W & Suo, Z 2002, Effects of mechanical strain on amorphous silicon thin-film transistors. in JD Cohen, JR Abelson, H Matsumura & J Robertson (eds), Amorphous and heterogeneous silicon-based films – 2002 : volume 715 - MRS proceedings. vol. 715, MRS Symposium Proceedings, vol. 715, Warrendale, PA , pp. A3.4.1-A3.4.11, 2002 MRS Spring Meeting & Exhibit, San Francisco, United States, 1/04/02.

Effects of mechanical strain on amorphous silicon thin-film transistors. / Gleskova, H.; Wagner, S.; Soboyejo, W.; Suo, Z.

Amorphous and heterogeneous silicon-based films – 2002 : volume 715 - MRS proceedings. ed. / J. D. Cohen; J. R. Abelson; H. Matsumura; J. Robertson. Vol. 715 Warrendale, PA , 2002. p. A3.4.1-A3.4.11 (MRS Symposium Proceedings; Vol. 715).

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - Effects of mechanical strain on amorphous silicon thin-film transistors

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N2 - This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors

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M3 - Conference contribution book

SN - 9781558996519

VL - 715

T3 - MRS Symposium Proceedings

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BT - Amorphous and heterogeneous silicon-based films – 2002

A2 - Cohen, J. D.

A2 - Abelson, J. R.

A2 - Matsumura, H.

A2 - Robertson, J.

CY - Warrendale, PA

ER -

Gleskova H, Wagner S, Soboyejo W, Suo Z. Effects of mechanical strain on amorphous silicon thin-film transistors. In Cohen JD, Abelson JR, Matsumura H, Robertson J, editors, Amorphous and heterogeneous silicon-based films – 2002 : volume 715 - MRS proceedings. Vol. 715. Warrendale, PA . 2002. p. A3.4.1-A3.4.11. (MRS Symposium Proceedings).