Effects of mechanical strain on amorphous silicon thin-film transistors

H. Gleskova, S. Wagner, W. Soboyejo, Z. Suo

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

7 Citations (Scopus)

Abstract

This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors
Original languageEnglish
Title of host publicationAmorphous and heterogeneous silicon-based films – 2002
Subtitle of host publicationvolume 715 - MRS proceedings
EditorsJ. D. Cohen, J. R. Abelson, H. Matsumura, J. Robertson
Place of PublicationWarrendale, PA
PagesA3.4.1-A3.4.11
Number of pages11
Volume715
Publication statusPublished - 2002
Event2002 MRS Spring Meeting & Exhibit - Moscone West Convention Center, San Francisco, United States
Duration: 1 Apr 20025 Apr 2002
http://www.mrs.org/spring2002/

Publication series

NameMRS Symposium Proceedings
PublisherMaterials Research Society
Volume715

Conference

Conference2002 MRS Spring Meeting & Exhibit
CountryUnited States
CitySan Francisco
Period1/04/025/04/02
OtherThe 2002 MRS Spring Meeting was held in San Francisco's Moscone West Convention Center. 24 technical symposia, grouped into six broad topical clusters, were held.
Internet address

Keywords

  • effects
  • mechanical strain
  • amorphous
  • silicon thin film transistors

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