Truly nanostructured materials pose a significant spatial resolution challenge to the conventional Electron Backscatter Diffraction (EBSD) characterization technique. Nevertheless, the interaction volume can be reduced by the use of electron transparent samples and the acquisition of electron backscatterlike patterns (EBSP) in transmission mode instead. These transmission Kikuchi diffraction (TKD) patterns are typically acquired by mounting a thin foil, similar to transmission electron microscopy (TEM), and tilting it at a slight angle (20◦ -30◦ ) from horizontal towards a standard EBSD camera.
- electron backscatter diffraction (EBSD)
- electron backscatterlike patterns (EBSP)
- transmission Kikuchi diffraction (TKD) patterns