TY - JOUR
T1 - Dynamic analysis of submerged microscale plates
T2 - the effects of acoustic radiation and viscous dissipation
AU - Wu, Zhangming
AU - Ma, Xianghong
PY - 2016/3/23
Y1 - 2016/3/23
N2 - The aim of this paper is to study the dynamic characteristics of micromechanical rectangular plates used as sensing elements in a viscous compressible fluid. A novel modelling procedure for the plate- fluid interaction problem is developed on the basis of linearized Navier-Stokes equations and noslip conditions. Analytical expression for the fluidloading impedance is obtained using a double Fourier transform approach. This modelling work provides us an analytical means to study the effects of inertial loading, acoustic radiation and viscous dissipation of the fluid acting on the vibration of microplates. The numerical simulation is conducted on microplates with different boundary conditions and fluids with different viscosities. The simulation results reveal that the acoustic radiation dominates the damping mechanism of the submerged microplates. It is also proved that microplates offer better sensitivities (Q-factors) than the conventional beam type microcantilevers beingmass sensing platforms in a viscous fluid environment. The frequency response features of microplates under highly viscous fluid loading are studied using the present model. The dynamics of the microplates with all edges clamped are less influenced by the highly viscous dissipation of the fluid than the microplates with other types of boundary conditions.
AB - The aim of this paper is to study the dynamic characteristics of micromechanical rectangular plates used as sensing elements in a viscous compressible fluid. A novel modelling procedure for the plate- fluid interaction problem is developed on the basis of linearized Navier-Stokes equations and noslip conditions. Analytical expression for the fluidloading impedance is obtained using a double Fourier transform approach. This modelling work provides us an analytical means to study the effects of inertial loading, acoustic radiation and viscous dissipation of the fluid acting on the vibration of microplates. The numerical simulation is conducted on microplates with different boundary conditions and fluids with different viscosities. The simulation results reveal that the acoustic radiation dominates the damping mechanism of the submerged microplates. It is also proved that microplates offer better sensitivities (Q-factors) than the conventional beam type microcantilevers beingmass sensing platforms in a viscous fluid environment. The frequency response features of microplates under highly viscous fluid loading are studied using the present model. The dynamics of the microplates with all edges clamped are less influenced by the highly viscous dissipation of the fluid than the microplates with other types of boundary conditions.
KW - acoustic radiation
KW - dynamics
KW - fluid structure interaction
KW - microelectromechanical systems
KW - viscous damping
UR - http://www.scopus.com/inward/record.url?scp=84962858688&partnerID=8YFLogxK
UR - http://rspa.royalsocietypublishing.org/
U2 - 10.1098/rspa.2015.0728
DO - 10.1098/rspa.2015.0728
M3 - Article
AN - SCOPUS:84962858688
SN - 1364-5021
VL - 472
JO - Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences
JF - Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences
IS - 2187
M1 - 20150728
ER -