Display assembly having flexible transistors on a flexible substrate

C Forbes (Inventor), A. Gelbman (Inventor), H. Gleskova (Inventor), C. Turner (Inventor), S. Wagner (Inventor)

Research output: Patent

Abstract

A thin film transistor array fabricated on a polyimide substrate forms a backplane for an electronic display. The thin film transistor array incorporates gate electrodes, a gate insulating layer, semiconducting channel layers deposited on top of the gate insulating layer, a source electrode, a drain electrode and a contact layer beneath each of the source and drain electrodes and in contact with at least the channel layer. An insulating encapsulation layer is positioned on the channel layer. The layers are deposited onto the polyimide substrate using PECVD and etched using photolithography to form the backplane.
LanguageEnglish
Patent numberUS6885032
IPCH01L029/04
Publication statusPublished - 26 Apr 2005

Fingerprint

transistors
assembly
electrodes
polyimides
photolithography
thin films
electronics

Keywords

  • thin film
  • polymide substrate
  • electrodes

Cite this

Forbes, C., Gelbman, A., Gleskova, H., Turner, C., & Wagner, S. (2005). IPC No. H01L029/04. Display assembly having flexible transistors on a flexible substrate. (Patent No. US6885032).
Forbes, C (Inventor) ; Gelbman, A. (Inventor) ; Gleskova, H. (Inventor) ; Turner, C. (Inventor) ; Wagner, S. (Inventor). / Display assembly having flexible transistors on a flexible substrate. IPC No.: H01L029/04. Patent No.: US6885032.
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Forbes, C, Gelbman, A, Gleskova, H, Turner, C & Wagner, S 2005, Display assembly having flexible transistors on a flexible substrate, Patent No. US6885032, IPC No. H01L029/04.

Display assembly having flexible transistors on a flexible substrate. / Forbes, C (Inventor); Gelbman, A. (Inventor); Gleskova, H. (Inventor); Turner, C. (Inventor); Wagner, S. (Inventor).

IPC No.: H01L029/04. Patent No.: US6885032.

Research output: Patent

TY - PAT

T1 - Display assembly having flexible transistors on a flexible substrate

AU - Forbes, C

AU - Gelbman, A.

AU - Gleskova, H.

AU - Turner, C.

AU - Wagner, S.

PY - 2005/4/26

Y1 - 2005/4/26

N2 - A thin film transistor array fabricated on a polyimide substrate forms a backplane for an electronic display. The thin film transistor array incorporates gate electrodes, a gate insulating layer, semiconducting channel layers deposited on top of the gate insulating layer, a source electrode, a drain electrode and a contact layer beneath each of the source and drain electrodes and in contact with at least the channel layer. An insulating encapsulation layer is positioned on the channel layer. The layers are deposited onto the polyimide substrate using PECVD and etched using photolithography to form the backplane.

AB - A thin film transistor array fabricated on a polyimide substrate forms a backplane for an electronic display. The thin film transistor array incorporates gate electrodes, a gate insulating layer, semiconducting channel layers deposited on top of the gate insulating layer, a source electrode, a drain electrode and a contact layer beneath each of the source and drain electrodes and in contact with at least the channel layer. An insulating encapsulation layer is positioned on the channel layer. The layers are deposited onto the polyimide substrate using PECVD and etched using photolithography to form the backplane.

KW - thin film

KW - polymide substrate

KW - electrodes

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Forbes C, Gelbman A, Gleskova H, Turner C, Wagner S, inventors. Display assembly having flexible transistors on a flexible substrate. H01L029/04. 2005 Apr 26.