Abstract
This chapter looks at direct writing and lift-off patterning of copper lines at 200ºC maximum process temperature
Original language | English |
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Title of host publication | Flat panel display materials III |
Subtitle of host publication | volume 471 - MRS proceedings |
Editors | G. N. Parsons, R. T. Fulks, D. E. Slobodin, T. H. Yuzuriha |
Place of Publication | Warrendale, PA |
Pages | 35-40 |
Number of pages | 6 |
Volume | 471 |
Publication status | Published - 10 Sept 1997 |
Event | MRS Spring Meeting 1997 - San Francisco, United States Duration: 31 Mar 1997 → 4 Apr 1997 |
Publication series
Name | MRS Symposium Proceedings |
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Publisher | Materials Research Society |
Volume | 471 |
Conference
Conference | MRS Spring Meeting 1997 |
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Country/Territory | United States |
City | San Francisco |
Period | 31/03/97 → 4/04/97 |
Keywords
- direct writing
- lift-off patterning
- copper lines
- 200-degrees-C