Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers

Euan Boyd, Volker Nock, Dominik Weiland, Xudong Li, Deepak Uttamchandani

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

As microelectromechanical systems (MEMS) become more complex and is produced in even greater numbers it becomes increasingly important to have a full understanding of the mechanical properties
of the commonly used MEMS materials. One of the most important properties for MEMS is the Young’s modulus. This work describes the direct comparison of two methods often used for measuring the Young’s
modulus of thin film materials using micro-cantilever test structures: a load-deflection method and a resonant frequency method. The comparison was carried out for a range of materials, different cantilever
geometries as well as for single and multilayer materials. It was found that both methods produce results that agree with each other and also agree with the values most often given in the literature.
Original languageEnglish
Pages (from-to)440-446
Number of pages7
JournalSensors and Actuators A: Physical
Volume172
Issue number2
Early online date30 Sep 2011
DOIs
Publication statusPublished - 1 Dec 2011

Keywords

  • Young’s modulus
  • elastic modulus
  • MEMS
  • micro-cantilevers
  • resonant frequency
  • load-deflection method
  • mechanical characterisation

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