Diamond drilling of micro-holes on glass wafer for MEMS

Research output: Contribution to conference › Paper › peer-review

Original language	English
Pages	521-530
Number of pages	10
Publication status	Published - 11 Sept 2008
Event	6th International Conference on Manufacturing Research, ICMR 08 - London Duration: 9 Sept 2008 → 11 Sept 2008

Conference	6th International Conference on Manufacturing Research, ICMR 08
City	London
Period	9/09/08 → 11/09/08

Keywords

@conference{173d6d9244b343f595229b94e1f994bd,

title = "Diamond drilling of micro-holes on glass wafer for MEMS",

keywords = "diamond drilling, glass",

author = "Xichun Luo",

year = "2008",

month = sep,

day = "11",

language = "English",

pages = "521--530",

note = "6th International Conference on Manufacturing Research, ICMR 08 ; Conference date: 09-09-2008 Through 11-09-2008",

}