Diamond double-sided micro-lenses and reflection gratings

C.L. Lee, M.D. Dawson, E. Gu

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Double-sided micro-lenses have been successfully fabricated on natural diamond substrates using photoresist reflow method followed by Inductively Coupled Plasma (ICP) etching. The micro-lenses were fabricated on both sides of the substrates which were aligned to each other. The optical properties of these lenses were characterised by a laser scanning transmission/reflection confocal microscope. It has been confirmed by the confocal microscopy technique that the laser beam was focused twice as it shone through the substrates. The focal length was calculated based on refraction formula at the spherical surface which has been derived from Fermat's principle. The top focused point was found lying within the substrates while the bottom focused point lying outside of the substrates. Both focal lengths of the top and bottom micro-lenses agree well with the theoretical calculation based on the refraction formula. This demonstrates the functionality of the double-sided micro-lenses. In addition, highly smooth diffraction gratings (surface rms roughness of 1 nm) with near-vertical sidewalls (85 ± 5°) have also been successfully fabricated on the HPHT diamond substrate utilising SiO2 as mask and Reactive Ion Etching (RIE) and ICP plasma etching. The optical functionality of the diamond reflection grating has been confirmed by the reflection measurement.
LanguageEnglish
Pages1123-1129
Number of pages7
JournalOptical Materials
Volume32
Issue number9
DOIs
Publication statusPublished - Jul 2010

Fingerprint

Diamond
Lenses
Diamonds
diamonds
lenses
gratings
Substrates
Plasma etching
Inductively coupled plasma
plasma etching
Refraction
refraction
Fermat principle
Confocal microscopy
Reactive ion etching
Diffraction gratings
Photoresists
gratings (spectra)
photoresists
Laser beams

Keywords

  • diamond double-sided micro-lenses
  • diamond micro-grating
  • optical properties
  • inductively-coupled plasma etching

Cite this

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Diamond double-sided micro-lenses and reflection gratings. / Lee, C.L.; Dawson, M.D.; Gu, E.

In: Optical Materials, Vol. 32, No. 9, 07.2010, p. 1123-1129.

Research output: Contribution to journalArticle

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