Development of a biologically inspired MEMS microphone

Y. Zhang; R. Bauer; W.M. Whitmer; W.O. Brimijoin; D. Uttamchandani; J. F. C. Windmill; J.C. Jackson

doi:10.1109/ICSENS.2017.8234383

Development of a biologically inspired MEMS microphone

Y. Zhang, R. Bauer, W.M. Whitmer, W.O. Brimijoin, D. Uttamchandani, J. F. C. Windmill, J.C. Jackson

Electronic And Electrical Engineering

Research output: Contribution to conference › Paper › peer-review

4 Citations (Scopus)

57 Downloads (Pure)

Abstract

A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.

Original language	English
Number of pages	3
DOIs	https://doi.org/10.1109/ICSENS.2017.8234383
Publication status	Published - 25 Dec 2017
Event	IEEE SENSORS 2017 - Scottish Exhibition and Conference Centre, Glasgow, United Kingdom Duration: 29 Oct 2017 → 1 Nov 2017 http://www.ieee-sensors2017.org

Conference

Conference	IEEE SENSORS 2017
Country	United Kingdom
City	Glasgow
Period	29/10/17 → 1/11/17
Internet address	http://www.ieee-sensors2017.org

Keywords

MEMS directional microphone
biologically inspired
multi-sensing methods
multi-band sensing

Access to Document

10.1109/ICSENS.2017.8234383

Zhang-etal-IEEESensors2017-Development-of-a-biologically-inspired-MEMS-microphoneAccepted author manuscript, 972 KB

Fingerprint Dive into the research topics of 'Development of a biologically inspired MEMS microphone'. Together they form a unique fingerprint.

2 Finished

Novel directional microphone design for speech enhancement in complex environments
Windmill, J., Jackson, J. & Uttamchandani, D.
EPSRC (Engineering and Physical Sciences Research Council)
1/07/15 → 28/02/19
Project: Research
Soft And Small: Acoustic Transducers Inspired By Nature - SASATIN (EU European Research Council (ERC) Consolidator Grant)
Windmill, J.
European Commission - FP7 - European Research Council
1/02/14 → 31/01/19
Project: Research

4 Citations
2 Conference contribution book
1 Article
1 Conference Contribution

Influence of microphone housing on the directional response of piezoelectric MEMS microphones inspired by Ormia ochracea
Bauer, R., Zhang, Y., Jackson, J. C., Whitmer, W. M., Brimijoin, W. O., Akeroyd, M. A., Uttamchandani, D. & Windmill, J. F. C., 1 Sep 2017, In: IEEE Sensors Journal. 17, 17, p. 5529-5536 8 p.
Research output: Contribution to journal › Article › peer-review

Open Access
File
9 Citations (Scopus)

109 Downloads (Pure)
New ormia-inspired directional MEMS microphone operating in a low frequency band
Zhang, Y., Bauer, R., Windmill, J. F., Uttamchandani, D. & Jackson, J., 10 Jun 2017, In: Journal of the Acoustical Society of America. 141, 5, 1 p., 3794.
Research output: Contribution to journal › Conference Contribution › peer-review

Open Access
File
33 Downloads (Pure)
Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea
Zhang, Y., Bauer, R., Windmill, J. F. C. & Uttamchandani, D., 28 Jan 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, N.J.: IEEE, p. 1114 - 1117 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Open Access
File
16 Citations (Scopus)

86 Downloads (Pure)

Cite this

@conference{02f7883b25ee47d6b37580bd0f6a1e27,

title = "Development of a biologically inspired MEMS microphone",

abstract = "A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy. ",

keywords = "MEMS directional microphone, biologically inspired, multi-sensing methods, multi-band sensing",

author = "Y. Zhang and R. Bauer and W.M. Whitmer and W.O. Brimijoin and D. Uttamchandani and Windmill, {J. F. C.} and J.C. Jackson",

note = "{\textcopyright} 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; IEEE SENSORS 2017 ; Conference date: 29-10-2017 Through 01-11-2017",

year = "2017",

month = dec,

day = "25",

doi = "10.1109/ICSENS.2017.8234383",

language = "English",

url = "http://www.ieee-sensors2017.org",

}

TY - CONF

T1 - Development of a biologically inspired MEMS microphone

AU - Zhang, Y.

AU - Bauer, R.

AU - Whitmer, W.M.

AU - Brimijoin, W.O.

AU - Uttamchandani, D.

AU - Windmill, J. F. C.

AU - Jackson, J.C.

N1 - © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2017/12/25

Y1 - 2017/12/25

N2 - A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.

AB - A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.

KW - MEMS directional microphone

KW - biologically inspired

KW - multi-sensing methods

KW - multi-band sensing

U2 - 10.1109/ICSENS.2017.8234383

DO - 10.1109/ICSENS.2017.8234383

M3 - Paper

T2 - IEEE SENSORS 2017

Y2 - 29 October 2017 through 1 November 2017

ER -

Development of a biologically inspired MEMS microphone

Abstract

Conference

Keywords

Access to Document

Novel directional microphone design for speech enhancement in complex environments

Soft And Small: Acoustic Transducers Inspired By Nature - SASATIN (EU European Research Council (ERC) Consolidator Grant)

Influence of microphone housing on the directional response of piezoelectric MEMS microphones inspired by Ormia ochracea

New ormia-inspired directional MEMS microphone operating in a low frequency band

Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Cite this