Development of a biologically inspired MEMS microphone

Y. Zhang; R. Bauer; W.M. Whitmer; W.O. Brimijoin; D. Uttamchandani; J. F. C. Windmill; J.C. Jackson

doi:10.1109/ICSENS.2017.8234383

Development of a biologically inspired MEMS microphone

Y. Zhang, R. Bauer, W.M. Whitmer, W.O. Brimijoin, D. Uttamchandani, J. F. C. Windmill, J.C. Jackson

Electronic And Electrical Engineering

Research output: Contribution to conference › Paper

4 Citations (Scopus)

44 Downloads (Pure)

Abstract

A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.

Original language	English
Number of pages	3
DOIs	https://doi.org/10.1109/ICSENS.2017.8234383
Publication status	Published - 25 Dec 2017
Event	IEEE SENSORS 2017 - Scottish Exhibition and Conference Centre, Glasgow, United Kingdom Duration: 29 Oct 2017 → 1 Nov 2017 http://www.ieee-sensors2017.org

Conference

Conference	IEEE SENSORS 2017
Country	United Kingdom
City	Glasgow
Period	29/10/17 → 1/11/17
Internet address	http://www.ieee-sensors2017.org

Keywords

MEMS directional microphone
biologically inspired
multi-sensing methods
multi-band sensing

Access to Document

10.1109/ICSENS.2017.8234383

Zhang-etal-IEEESensors2017-Development-of-a-biologically-inspired-MEMS-microphoneAccepted author manuscript, 972 KB

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Projects

2 Finished

Novel directional microphone design for speech enhancement in complex environments

Windmill, J., Jackson, J. & Uttamchandani, D.

EPSRC (Engineering and Physical Sciences Research Council)

1/07/15 → 28/02/19

Project: Research

Soft And Small: Acoustic Transducers Inspired By Nature - SASATIN (EU European Research Council (ERC) Consolidator Grant)

Windmill, J.

European Commission - FP7 - European Research Council

1/02/14 → 31/01/19

Project: Research

Research Output

4 Citations
2 Conference contribution book
1 Article
1 Conference Contribution

Influence of microphone housing on the directional response of piezoelectric MEMS microphones inspired by Ormia ochracea

Bauer, R., Zhang, Y., Jackson, J. C., Whitmer, W. M., Brimijoin, W. O., Akeroyd, M. A., Uttamchandani, D. & Windmill, J. F. C., 1 Sep 2017, In : IEEE Sensors Journal. 17, 17, p. 5529-5536 8 p.

Research output: Contribution to journal › Article

Open Access

File

8 Citations (Scopus)

102 Downloads (Pure)

New ormia-inspired directional MEMS microphone operating in a low frequency band

Zhang, Y., Bauer, R., Windmill, J. F., Uttamchandani, D. & Jackson, J., 10 Jun 2017, In : Journal of the Acoustical Society of America. 141, 5, 1 p., 3794.

Research output: Contribution to journal › Conference Contribution

Open Access

File

26 Downloads (Pure)

Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Zhang, Y., Bauer, R., Windmill, J. F. C. & Uttamchandani, D., 28 Jan 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, N.J.: IEEE, p. 1114 - 1117 4 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Open Access

File

15 Citations (Scopus)

53 Downloads (Pure)

Cite this

Zhang, Y., Bauer, R., Whitmer, W. M., Brimijoin, W. O., Uttamchandani, D., Windmill, J. F. C., & Jackson, J. C. (2017). Development of a biologically inspired MEMS microphone. Paper presented at IEEE SENSORS 2017, Glasgow, United Kingdom. https://doi.org/10.1109/ICSENS.2017.8234383

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