Abstract
| Language | English |
|---|---|
| Number of pages | 3 |
| Publication status | Accepted/In press - 10 Aug 2017 |
| Event | IEEE SENSORS 2017 - Scottish Exhibition and Conference Centre, Glasgow, United Kingdom Duration: 29 Oct 2017 → 1 Nov 2017 |
Conference
| Conference | IEEE SENSORS 2017 |
|---|---|
| Country | United Kingdom |
| City | Glasgow |
| Period | 29/10/17 → 1/11/17 |
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Keywords
- MEMS directional microphone
- biologically inspired
- multi-sensing methods
- multi-band sensing
Cite this
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Development of a biologically inspired MEMS microphone. / Zhang, Y.; Bauer, R.; Whitmer, W.M.; Brimijoin, W.O.; Uttamchandani, D.; Windmill, J. F. C.; Jackson, J.C.
2017. Paper presented at IEEE SENSORS 2017, Glasgow, United Kingdom.Research output: Contribution to conference › Paper
TY - CONF
T1 - Development of a biologically inspired MEMS microphone
AU - Zhang, Y.
AU - Bauer, R.
AU - Whitmer, W.M.
AU - Brimijoin, W.O.
AU - Uttamchandani, D.
AU - Windmill, J. F. C.
AU - Jackson, J.C.
N1 - © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
PY - 2017/8/10
Y1 - 2017/8/10
N2 - A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.
AB - A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.
KW - MEMS directional microphone
KW - biologically inspired
KW - multi-sensing methods
KW - multi-band sensing
UR - http://ieee-sensors2017.org/
M3 - Paper
ER -