Development of a biologically inspired MEMS microphone

Research output: Contribution to conferencePaper

Abstract

A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.
LanguageEnglish
Number of pages3
Publication statusAccepted/In press - 10 Aug 2017
EventIEEE SENSORS 2017 - Scottish Exhibition and Conference Centre, Glasgow, United Kingdom
Duration: 29 Oct 20171 Nov 2017

Conference

ConferenceIEEE SENSORS 2017
CountryUnited Kingdom
CityGlasgow
Period29/10/171/11/17

Fingerprint

Microphones
MEMS
Piezoelectric actuators
Audition
Speech recognition
Transient analysis
Acoustics

Keywords

  • MEMS directional microphone
  • biologically inspired
  • multi-sensing methods
  • multi-band sensing

Cite this

Zhang, Y., Bauer, R., Whitmer, W. M., Brimijoin, W. O., Uttamchandani, D., Windmill, J. F. C., & Jackson, J. C. (Accepted/In press). Development of a biologically inspired MEMS microphone. Paper presented at IEEE SENSORS 2017, Glasgow, United Kingdom.
Zhang, Y. ; Bauer, R. ; Whitmer, W.M. ; Brimijoin, W.O. ; Uttamchandani, D. ; Windmill, J. F. C. ; Jackson, J.C. / Development of a biologically inspired MEMS microphone. Paper presented at IEEE SENSORS 2017, Glasgow, United Kingdom.3 p.
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Zhang, Y, Bauer, R, Whitmer, WM, Brimijoin, WO, Uttamchandani, D, Windmill, JFC & Jackson, JC 2017, 'Development of a biologically inspired MEMS microphone' Paper presented at IEEE SENSORS 2017, Glasgow, United Kingdom, 29/10/17 - 1/11/17, .

Development of a biologically inspired MEMS microphone. / Zhang, Y.; Bauer, R.; Whitmer, W.M.; Brimijoin, W.O.; Uttamchandani, D.; Windmill, J. F. C.; Jackson, J.C.

2017. Paper presented at IEEE SENSORS 2017, Glasgow, United Kingdom.

Research output: Contribution to conferencePaper

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AU - Uttamchandani, D.

AU - Windmill, J. F. C.

AU - Jackson, J.C.

N1 - © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2017/8/10

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N2 - A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.

AB - A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 0.42 V/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.

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Zhang Y, Bauer R, Whitmer WM, Brimijoin WO, Uttamchandani D, Windmill JFC et al. Development of a biologically inspired MEMS microphone. 2017. Paper presented at IEEE SENSORS 2017, Glasgow, United Kingdom.