Abstract
Microfabricated square electrodes with finely controlled highly reproducible dimensions have been developed for electrochemical analysis of high-temperature molten salt (MS). These microelectrodes have been fabricated using photolithographic techniques on silicon wafers and have been designed for operation in lithium chloride/potassium chloride eutectic salt at and ~500 °C. The electrodes are constructed from a series of patterned layers, and their development has involved a systematic study and optimization of a number of different material combinations. This has resulted in a process for making electrodes that represents a step change in capability, delivering the first robust microelectrode device capable of quantitative electroanalysis in a MS system at 500 °C.
Original language | English |
---|---|
Pages (from-to) | 1346-1354 |
Number of pages | 9 |
Journal | Journal of Microelectromechanical Systems |
Volume | 24 |
Issue number | 5 |
DOIs | |
Publication status | Published - 31 Oct 2015 |
Keywords
- microelectrodes
- molten salt
- microfabrication
- high temperatures