Deterministic fabrication of micro- and nanostructures by focused ion beam

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Name	Lecture Notes in Nanoscale Science and Technology
Publisher	Springer

Cite this

@inbook{2d94481193a14a3e890e787ed7631f80,

title = "Deterministic fabrication of micro- and nanostructures by focused ion beam",

author = "Jining Sun and Xichun Luo",

year = "2014",

month = jan,

day = "13",

language = "English",

isbn = "9783319028736",

series = "Lecture Notes in Nanoscale Science and Technology",

publisher = "Springer",

pages = "161--204",

editor = "Wang, \{Zhiming M.\}",

booktitle = "FIB Nanostructures",

address = "Switzerland",

}

TY - CHAP

T1 - Deterministic fabrication of micro- and nanostructures by focused ion beam

AU - Sun, Jining

AU - Luo, Xichun

PY - 2014/1/13

Y1 - 2014/1/13

UR - http://www.springer.com/materials/nanotechnology/book/978-3-319-02873-6

M3 - Chapter

SN - 9783319028736

T3 - Lecture Notes in Nanoscale Science and Technology

SP - 161

EP - 204

BT - FIB Nanostructures

A2 - Wang, Zhiming M.

PB - Springer

ER -