Deterministic fabrication of micro- and nanostructures by focused ion beam

Jining Sun, Xichun Luo

Research output: Chapter in Book/Report/Conference proceedingChapter

LanguageEnglish
Title of host publicationFIB Nanostructures
EditorsZhiming M. Wang
PublisherSpringer
Pages161-204
Number of pages44
ISBN (Print)9783319028736
Publication statusPublished - 13 Jan 2014

Publication series

NameLecture Notes in Nanoscale Science and Technology
PublisherSpringer

Cite this

Sun, J., & Luo, X. (2014). Deterministic fabrication of micro- and nanostructures by focused ion beam. In Z. M. Wang (Ed.), FIB Nanostructures (pp. 161-204). (Lecture Notes in Nanoscale Science and Technology). Springer.
Sun, Jining ; Luo, Xichun. / Deterministic fabrication of micro- and nanostructures by focused ion beam. FIB Nanostructures. editor / Zhiming M. Wang. Springer, 2014. pp. 161-204 (Lecture Notes in Nanoscale Science and Technology).
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month = "1",
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Sun, J & Luo, X 2014, Deterministic fabrication of micro- and nanostructures by focused ion beam. in ZM Wang (ed.), FIB Nanostructures. Lecture Notes in Nanoscale Science and Technology, Springer, pp. 161-204.

Deterministic fabrication of micro- and nanostructures by focused ion beam. / Sun, Jining; Luo, Xichun.

FIB Nanostructures. ed. / Zhiming M. Wang. Springer, 2014. p. 161-204 (Lecture Notes in Nanoscale Science and Technology).

Research output: Chapter in Book/Report/Conference proceedingChapter

TY - CHAP

T1 - Deterministic fabrication of micro- and nanostructures by focused ion beam

AU - Sun, Jining

AU - Luo, Xichun

PY - 2014/1/13

Y1 - 2014/1/13

UR - http://www.springer.com/materials/nanotechnology/book/978-3-319-02873-6

M3 - Chapter

SN - 9783319028736

T3 - Lecture Notes in Nanoscale Science and Technology

SP - 161

EP - 204

BT - FIB Nanostructures

A2 - Wang, Zhiming M.

PB - Springer

ER -

Sun J, Luo X. Deterministic fabrication of micro- and nanostructures by focused ion beam. In Wang ZM, editor, FIB Nanostructures. Springer. 2014. p. 161-204. (Lecture Notes in Nanoscale Science and Technology).