Deterministic fabrication of micro- and nanostructures by focused ion beam

Jining Sun, Xichun Luo

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationFIB Nanostructures
EditorsZhiming M. Wang
PublisherSpringer
Pages161-204
Number of pages44
ISBN (Print)9783319028736
Publication statusPublished - 13 Jan 2014

Publication series

NameLecture Notes in Nanoscale Science and Technology
PublisherSpringer

Cite this

Sun, J., & Luo, X. (2014). Deterministic fabrication of micro- and nanostructures by focused ion beam. In Z. M. Wang (Ed.), FIB Nanostructures (pp. 161-204). (Lecture Notes in Nanoscale Science and Technology). Springer.