Determination of the anisotropy of Young's modulus using a coupled microcantilever array

Bhaskar B. Choubey, Euan James E.J. Boyd, Ian I. Armstrong, Deepak G. D.G. Uttamchandani

Research output: Contribution to journal › Article

14 Citations (Scopus)

Abstract

This paper reports a simple technique to measure the anisotropy of the Young's modulus of MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal silicon with an array of cantilevers fabricated in (100) silicon following a “wagon wheel” configuration. The long axis of the cantilevers had different angular orientations to the [110] direction. The parasitic coupling due to undercut below the cantilevers, which is often observed during etching of MEMS, led to a collective behavior in the frequency response of the cantilevers. This collective behavior was used in association with an inverse eigenvalue analysis to obtain the Young's moduli for the different orientations. Further analysis of the technique relating to accuracy and precision required in the resonance frequency measurement has also been presented.
LanguageEnglish
Pages1252-1260
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume21
Issue number5
DOIs
Publication statusPublished - 25 Jul 2012

Fingerprint

MEMS
Anisotropy
Elastic moduli
Silicon
Frequency response
Etching
Wheels
Single crystals

Keywords

  • microcantilever array
  • anisotropy
  • Young's modulus

Cite this

Choubey, Bhaskar B. ; Boyd, Euan James E.J. ; Armstrong, Ian I. ; Uttamchandani, Deepak G. D.G. / Determination of the anisotropy of Young's modulus using a coupled microcantilever array. In: Journal of Microelectromechanical Systems. 2012 ; Vol. 21, No. 5. pp. 1252-1260.
@article{e139d0b4477b4ed9a225ebe4967a228d,
title = "Determination of the anisotropy of Young's modulus using a coupled microcantilever array",
abstract = "This paper reports a simple technique to measure the anisotropy of the Young's modulus of MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal silicon with an array of cantilevers fabricated in (100) silicon following a “wagon wheel” configuration. The long axis of the cantilevers had different angular orientations to the [110] direction. The parasitic coupling due to undercut below the cantilevers, which is often observed during etching of MEMS, led to a collective behavior in the frequency response of the cantilevers. This collective behavior was used in association with an inverse eigenvalue analysis to obtain the Young's moduli for the different orientations. Further analysis of the technique relating to accuracy and precision required in the resonance frequency measurement has also been presented.",
keywords = "microcantilever array , anisotropy , Young's modulus",
author = "Choubey, {Bhaskar B.} and Boyd, {Euan James E.J.} and Armstrong, {Ian I.} and Uttamchandani, {Deepak G. D.G.}",
year = "2012",
month = "7",
day = "25",
doi = "10.1109/JMEMS.2012.2205137",
language = "English",
volume = "21",
pages = "1252--1260",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
number = "5",

}

Choubey, BB, Boyd, EJEJ, Armstrong, II & Uttamchandani, DGDG 2012, 'Determination of the anisotropy of Young's modulus using a coupled microcantilever array' Journal of Microelectromechanical Systems, vol. 21, no. 5, pp. 1252-1260. https://doi.org/10.1109/JMEMS.2012.2205137

Determination of the anisotropy of Young's modulus using a coupled microcantilever array. / Choubey, Bhaskar B.; Boyd, Euan James E.J.; Armstrong, Ian I.; Uttamchandani, Deepak G. D.G.

In: Journal of Microelectromechanical Systems, Vol. 21, No. 5, 25.07.2012, p. 1252-1260.

Research output: Contribution to journal › Article

TY - JOUR

T1 - Determination of the anisotropy of Young's modulus using a coupled microcantilever array

AU - Choubey, Bhaskar B.

AU - Boyd, Euan James E.J.

AU - Armstrong, Ian I.

AU - Uttamchandani, Deepak G. D.G.

PY - 2012/7/25

Y1 - 2012/7/25

N2 - This paper reports a simple technique to measure the anisotropy of the Young's modulus of MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal silicon with an array of cantilevers fabricated in (100) silicon following a “wagon wheel” configuration. The long axis of the cantilevers had different angular orientations to the [110] direction. The parasitic coupling due to undercut below the cantilevers, which is often observed during etching of MEMS, led to a collective behavior in the frequency response of the cantilevers. This collective behavior was used in association with an inverse eigenvalue analysis to obtain the Young's moduli for the different orientations. Further analysis of the technique relating to accuracy and precision required in the resonance frequency measurement has also been presented.

AB - This paper reports a simple technique to measure the anisotropy of the Young's modulus of MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal silicon with an array of cantilevers fabricated in (100) silicon following a “wagon wheel” configuration. The long axis of the cantilevers had different angular orientations to the [110] direction. The parasitic coupling due to undercut below the cantilevers, which is often observed during etching of MEMS, led to a collective behavior in the frequency response of the cantilevers. This collective behavior was used in association with an inverse eigenvalue analysis to obtain the Young's moduli for the different orientations. Further analysis of the technique relating to accuracy and precision required in the resonance frequency measurement has also been presented.

KW - microcantilever array

KW - anisotropy

KW - Young's modulus

UR - http://www.scopus.com/inward/record.url?scp=84867101413&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2012.2205137

DO - 10.1109/JMEMS.2012.2205137

M3 - Article

VL - 21

SP - 1252

EP - 1260

JO - Journal of Microelectromechanical Systems

T2 - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 5

ER -

Choubey BB, Boyd EJEJ, Armstrong II, Uttamchandani DGDG. Determination of the anisotropy of Young's modulus using a coupled microcantilever array. Journal of Microelectromechanical Systems. 2012 Jul 25;21(5):1252-1260. https://doi.org/10.1109/JMEMS.2012.2205137

Access to Document