Determination of Ga auto-incorporation in nominal InAlN epilayers grown by MOCVD

M. D. Smith, E. Taylor , T. C. Sadler, V. Z. Zubialevich, K. Lorenz, H. N. Li, J. O'Connell, E. Alves, J. D. Holmes, R. W. Martin, P. J. Parbrook

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We report on the consistent measurement of gallium incorporation in nominal InAlN layers using various complimentary techniques, underpinned by X-ray diffraction. Nominal InAlN layers with similar growth conditions were prepared, and the change in unintended Ga content in the group III sublattice ranged from similar to 24% to similar to 12% when the total reactor flow rate was increased from 8000 to 24 000 standard cubic centimetres per minute. Ultra-thin InAlN/GaN HEMT layers were grown in a clean reactor to minimize Ga auto-incorporation, and measured using X-ray photoelectron spectroscopy and secondary ion mass spectrometry. The implications of Ga incorporation in InAlN layers within optoelectronic and power devices is discussed.
Original languageEnglish
Pages (from-to)5787-5792
Number of pages7
JournalJournal of Materials Chemistry. C
Issue number29
Early online date16 Apr 2014
Publication statusPublished - 2014


  • auto-incorporation
  • epilayers
  • gallium
  • InAlN
  • GaN


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