Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

A. Chaehoi, D. Weiland, R. Adamson, Mark Begbie, C. Lowrie, M.P.Y. Desmulliez, J.G. Brown, L. Li, D.G. Uttamchandani

Research output: Contribution to conferencePaper

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Engineering & Materials Science