Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

A. Chaehoi, D. Weiland, R. Adamson, Mark Begbie, C. Lowrie, M.P.Y. Desmulliez, J.G. Brown, L. Li, D.G. Uttamchandani

Research output: Contribution to conferencePaper

Abstract

This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.
Original languageEnglish
Publication statusUnpublished - Sep 2008
EventThe 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC) - Edinburgh, United Kingdom
Duration: 1 Jan 1900 → …

Conference

ConferenceThe 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC)
CityEdinburgh, United Kingdom
Period1/01/00 → …

Keywords

  • monolithic 3-axis piezoresistive accelerometer

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