Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

A. Chaehoi; D. Weiland; R. Adamson; Mark Begbie; C. Lowrie; M.P.Y. Desmulliez; J.G. Brown; L. Li; D.G. Uttamchandani

Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

A. Chaehoi, D. Weiland, R. Adamson, Mark Begbie, C. Lowrie, M.P.Y. Desmulliez, J.G. Brown, L. Li, D.G. Uttamchandani

Electronic And Electrical Engineering

Research output: Contribution to conference › Paper

Abstract

This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.

Original language	English
Publication status	Unpublished - Sept 2008
Event	The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC) - Edinburgh, United Kingdom Duration: 1 Jan 1900 → …

Conference

Conference	The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC)
City	Edinburgh, United Kingdom
Period	1/01/00 → …

Keywords

monolithic 3-axis piezoresistive accelerometer

Cite this

Chaehoi, A., Weiland, D., Adamson, R., Begbie, M., Lowrie, C., Desmulliez, M. P. Y., Brown, J. G., Li, L., & Uttamchandani, D. G. (2008). Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI. Paper presented at The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC), Edinburgh, United Kingdom.

@conference{ac5de63a5dd54b04ad31b2a422bd4bab,

title = "Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI",

abstract = "This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.",

keywords = "monolithic 3-axis piezoresistive accelerometer",

author = "A. Chaehoi and D. Weiland and R. Adamson and Mark Begbie and C. Lowrie and M.P.Y. Desmulliez and J.G. Brown and L. Li and D.G. Uttamchandani",

year = "2008",

month = sep,

language = "English",

note = "The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC) ; Conference date: 01-01-1900",

}

Chaehoi, A, Weiland, D, Adamson, R, Begbie, M, Lowrie, C, Desmulliez, MPY, Brown, JG, Li, L & Uttamchandani, DG 2008, 'Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI', Paper presented at The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC), Edinburgh, United Kingdom, 1/01/00.

TY - CONF

T1 - Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

AU - Chaehoi, A.

AU - Weiland, D.

AU - Adamson, R.

AU - Begbie, Mark

AU - Lowrie, C.

AU - Desmulliez, M.P.Y.

AU - Brown, J.G.

AU - Li, L.

AU - Uttamchandani, D.G.

PY - 2008/9

Y1 - 2008/9

N2 - This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.

AB - This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.

KW - monolithic 3-axis piezoresistive accelerometer

UR - http://essderc.iop.org/

M3 - Paper

T2 - The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC)

Y2 - 1 January 1900

ER -

Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

Abstract

Conference

Keywords

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