Design and implementation of a MEMS Cockcroft-Walton voltage multiplier

L. Li; D.G. Uttamchandani

doi:10.1049/el:20092767

Design and implementation of a MEMS Cockcroft-Walton voltage multiplier

L. Li, D.G. Uttamchandani

Electronic And Electrical Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A design modification to the Cockcroft-Walton (CW) voltage multiplier is reported for the purpose of miniaturisation using MEMS. The configuration comprises a cascade of CW voltage-doublers connected through their outputs and supply points (Vdd). Each voltage doubler is a two-stage CW multiplier that consists of four switches and three capacitors. The classical CW voltage multiplier has voltage amplification of Ns, where Ns ¼ 2Nd (Nd is the number of voltage doublers), while the modified design has an amplification of 2Nd. Using this configuration, a novel MEMS voltage doubler has been experimentally realised with micro-relays and capacitors. The MEMS relays and capacitors were fabricated using the MetalMUMPs MEMS process. Measurements on the MEMS voltage doubler have been conducted. A voltage output of 400 V has been demonstrated,and the risetime is measured to be around 260 ms.

Original language	English
Pages (from-to)	36-37
Number of pages	1
Journal	Electronics Letters
Volume	45
Issue number	1
DOIs	https://doi.org/10.1049/el:20092767
Publication status	Published - 1 Jan 2009

Keywords

amplification
capacitors
microrelays
voltage multipliers

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10.1049/el:20092767

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AB - A design modification to the Cockcroft-Walton (CW) voltage multiplier is reported for the purpose of miniaturisation using MEMS. The configuration comprises a cascade of CW voltage-doublers connected through their outputs and supply points (Vdd). Each voltage doubler is a two-stage CW multiplier that consists of four switches and three capacitors. The classical CW voltage multiplier has voltage amplification of Ns, where Ns ¼ 2Nd (Nd is the number of voltage doublers), while the modified design has an amplification of 2Nd. Using this configuration, a novel MEMS voltage doubler has been experimentally realised with micro-relays and capacitors. The MEMS relays and capacitors were fabricated using the MetalMUMPs MEMS process. Measurements on the MEMS voltage doubler have been conducted. A voltage output of 400 V has been demonstrated,and the risetime is measured to be around 260 ms.

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KW - capacitors

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JO - Electronics Letters

JF - Electronics Letters

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Design and implementation of a MEMS Cockcroft-Walton voltage multiplier

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