Abstract
This paper presents the analysis, design, and experimental study of a microcantilever optically-activated ultrasonic detection transducer. An analytical model was derived using 1-D cantilever structural dynamics, leading to the optimization of the transducer design. Finite element modeling enabled dynamic simulation to be performed, with results in good agreement with the analytical model. Transducers were fabricated using MEMS (microelectromechanical systems) techniques. Experimental results are presented on remote noncontact detection of ultrasound using the fabricated transducers; high SNR is achieved for the detected signals, even for relatively low ultrasonic amplitudes. Both analysis and experimental study show that the transducer has a sensitivity ∼1 to 2 orders of magnitude higher than that of conventional optical detection techniques. Furthermore, we show that the dominant factor in the increased sensitivity of the transducer is the resonant nature of the finger structure.
| Original language | English |
|---|---|
| Pages (from-to) | 2722-2732 |
| Number of pages | 11 |
| Journal | IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control |
| Volume | 56 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 28 Dec 2009 |
| Externally published | Yes |
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Keywords
- ultrasonic detection transducer
- cantilever structural dynamics
- microcantilever
- optimization
- dynamic simulation
- MEMS
- noncontact detection of ultrasound
Cite this
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Design and experimental study of microcantilever ultrasonic detection transducers. / Chen, Xuesheng; Stratoudaki, Theodosia; Sharples, Steve D.; Clark, Matt.
In: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 56, No. 12, 28.12.2009, p. 2722-2732.Research output: Contribution to journal › Article
TY - JOUR
T1 - Design and experimental study of microcantilever ultrasonic detection transducers
AU - Chen, Xuesheng
AU - Stratoudaki, Theodosia
AU - Sharples, Steve D.
AU - Clark, Matt
PY - 2009/12/28
Y1 - 2009/12/28
N2 - This paper presents the analysis, design, and experimental study of a microcantilever optically-activated ultrasonic detection transducer. An analytical model was derived using 1-D cantilever structural dynamics, leading to the optimization of the transducer design. Finite element modeling enabled dynamic simulation to be performed, with results in good agreement with the analytical model. Transducers were fabricated using MEMS (microelectromechanical systems) techniques. Experimental results are presented on remote noncontact detection of ultrasound using the fabricated transducers; high SNR is achieved for the detected signals, even for relatively low ultrasonic amplitudes. Both analysis and experimental study show that the transducer has a sensitivity ∼1 to 2 orders of magnitude higher than that of conventional optical detection techniques. Furthermore, we show that the dominant factor in the increased sensitivity of the transducer is the resonant nature of the finger structure.
AB - This paper presents the analysis, design, and experimental study of a microcantilever optically-activated ultrasonic detection transducer. An analytical model was derived using 1-D cantilever structural dynamics, leading to the optimization of the transducer design. Finite element modeling enabled dynamic simulation to be performed, with results in good agreement with the analytical model. Transducers were fabricated using MEMS (microelectromechanical systems) techniques. Experimental results are presented on remote noncontact detection of ultrasound using the fabricated transducers; high SNR is achieved for the detected signals, even for relatively low ultrasonic amplitudes. Both analysis and experimental study show that the transducer has a sensitivity ∼1 to 2 orders of magnitude higher than that of conventional optical detection techniques. Furthermore, we show that the dominant factor in the increased sensitivity of the transducer is the resonant nature of the finger structure.
KW - ultrasonic detection transducer
KW - cantilever structural dynamics
KW - microcantilever
KW - optimization
KW - dynamic simulation
KW - MEMS
KW - noncontact detection of ultrasound
UR - http://www.scopus.com/inward/record.url?scp=73649143905&partnerID=8YFLogxK
UR - http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=58
U2 - 10.1109/TUFFC.2009.1363
DO - 10.1109/TUFFC.2009.1363
M3 - Article
AN - SCOPUS:73649143905
VL - 56
SP - 2722
EP - 2732
JO - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
SN - 0885-3010
IS - 12
ER -