Abstract
The nature and interplay of intrinsic point and extended defects in n-type Si-doped InN epilayers with free carrier concentrations up to 6.6×1020 cm−3 are studied using positron annihilation spectroscopy and transmission electron microscopy and compared to results from undoped irradiated films. In as-grown Si-doped samples, mixed In-N vacancy complexes (VIn-VN) are the dominant III-sublattice related vacancy defects. An increase in the number of VN in these complexes toward the interface suggests high concentrations of additional isolated VN and VN-clusters near the GaN buffer layer and coincides with elevated dislocation densities in that area.
Original language | English |
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Article number | 091907 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 100 |
Issue number | 9 |
DOIs | |
Publication status | Published - 27 Feb 2012 |
Keywords
- defect evolution
- n-type InN
- dislocation densities