Deep UV emission from highly ordered AlGaN/AlN core-shell nanorods

Pierre Marie Coulon, Gunnar Kusch, Robert W. Martin, Philip A. Shields

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Three-dimensional core-shell nanostructures could resolve key problems existing in conventional planar deep UV light-emitting diode (LED) technology due to their high structural quality, high-quality nonpolar growth leading to a reduced quantum-confined Stark effect and their ability to improve light extraction. Currently, a major hurdle to their implementation in UV LEDs is the difficulty of growing such nanostructures from AlxGa1-xN materials with a bottom-up approach. In this paper, we report the successful fabrication of an AlN/AlxGa1-xN/AlN core-shell structure using an original hybrid top-down/bottom-up approach, thus representing a breakthrough in applying core-shell architecture to deep UV emission. Various AlN/AlxGa1-xN/AlN core-shell structures were grown on optimized AlN nanorod arrays. These were created using displacement Talbot lithography (DTL), a two-step dry-wet etching process, and optimized AlN metal organic vapor phase epitaxy regrowth conditions to achieve the facet recovery of straight and smooth AlN nonpolar facets, a necessary requirement for subsequent growth. Cathodoluminescence hyperspectral imaging of the emission characteristics revealed that 229 nm deep UV emission was achieved from the highly uniform array of core-shell AlN/AlxGa1-xN/AlN structures, which represents the shortest wavelength achieved so far with a core-shell architecture. This hybrid top-down/bottom-up approach represents a major advance for the fabrication of deep UV LEDs based on core-shell nanostructures.

LanguageEnglish
Pages33441-33449
Number of pages9
JournalACS Applied Materials and Interfaces
Volume10
Issue number39
DOIs
Publication statusPublished - 6 Sep 2018

Fingerprint

Nanorods
nanorods
Nanostructures
Light emitting diodes
Stark effect
Fabrication
Dry etching
Vapor phase epitaxy
Cathodoluminescence
Wet etching
light emitting diodes
Ultraviolet radiation
Lithography
Diodes
Metals
flat surfaces
Recovery
Wavelength
fabrication
aluminum gallium nitride

Keywords

  • AlGaN
  • AlN
  • cathodoluminescence
  • core-shell
  • EDX
  • nanorod
  • TEM

Cite this

Coulon, Pierre Marie ; Kusch, Gunnar ; Martin, Robert W. ; Shields, Philip A. / Deep UV emission from highly ordered AlGaN/AlN core-shell nanorods. In: ACS Applied Materials and Interfaces. 2018 ; Vol. 10, No. 39. pp. 33441-33449.
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Deep UV emission from highly ordered AlGaN/AlN core-shell nanorods. / Coulon, Pierre Marie; Kusch, Gunnar; Martin, Robert W.; Shields, Philip A.

In: ACS Applied Materials and Interfaces, Vol. 10, No. 39, 06.09.2018, p. 33441-33449.

Research output: Contribution to journalArticle

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