Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings

J Sharp, I Castillo Muller, P Mandal, A Abbas, G West, W M Rainforth, A Ehiasarian, P Hovsepian

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A FIB lift-out sample was made from a wear-resistant carbon coating deposited by high power impulse magnetron sputtering (HIPIMS) with Mo and W. TEM analysis found columnar grains extending the whole ∼1800 nm thick film. Within the grains, the carbon was found to be organised into clusters showing some onion-like structure, with amorphous material between them; energy dispersive X-ray spectroscopy (EDS) found these clusters to be Mo- and W-rich in a later, thinner sample of the same material. Electron energy-loss spectroscopy (EELS) showed no difference in C-K edge, implying the bonding type to be the same in cluster and matrix. These clusters were arranged into stripes parallel to the film plane, of spacing 7-8 nm; there was a modulation in spacing between clusters within these stripes that produced a second, coarser set of striations of spacing ∼37 nm.
LanguageEnglish
Article number012011
Number of pages4
JournalJournal of Physics: Conference Series
Volume644
DOIs
Publication statusPublished - 12 Oct 2015
Externally publishedYes

Fingerprint

Magnetron sputtering
impulses
magnetron sputtering
direct current
Transmission electron microscopy
coatings
Coatings
transmission electron microscopy
Carbon
Electron energy loss spectroscopy
carbon
Thick films
spacing
Energy dispersive spectroscopy
Modulation
Wear of materials
striation
amorphous materials
spectroscopy
thick films

Keywords

  • carbon coatings
  • thick film
  • carbon

Cite this

Sharp, J ; Castillo Muller, I ; Mandal, P ; Abbas, A ; West, G ; Rainforth, W M ; Ehiasarian, A ; Hovsepian, P. / Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings. In: Journal of Physics: Conference Series. 2015 ; Vol. 644.
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abstract = "A FIB lift-out sample was made from a wear-resistant carbon coating deposited by high power impulse magnetron sputtering (HIPIMS) with Mo and W. TEM analysis found columnar grains extending the whole ∼1800 nm thick film. Within the grains, the carbon was found to be organised into clusters showing some onion-like structure, with amorphous material between them; energy dispersive X-ray spectroscopy (EDS) found these clusters to be Mo- and W-rich in a later, thinner sample of the same material. Electron energy-loss spectroscopy (EELS) showed no difference in C-K edge, implying the bonding type to be the same in cluster and matrix. These clusters were arranged into stripes parallel to the film plane, of spacing 7-8 nm; there was a modulation in spacing between clusters within these stripes that produced a second, coarser set of striations of spacing ∼37 nm.",
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Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings. / Sharp, J; Castillo Muller, I; Mandal, P; Abbas, A; West, G; Rainforth, W M; Ehiasarian, A; Hovsepian, P.

In: Journal of Physics: Conference Series, Vol. 644, 012011, 12.10.2015.

Research output: Contribution to journalArticle

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T1 - Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings

AU - Sharp, J

AU - Castillo Muller, I

AU - Mandal, P

AU - Abbas, A

AU - West, G

AU - Rainforth, W M

AU - Ehiasarian, A

AU - Hovsepian, P

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AB - A FIB lift-out sample was made from a wear-resistant carbon coating deposited by high power impulse magnetron sputtering (HIPIMS) with Mo and W. TEM analysis found columnar grains extending the whole ∼1800 nm thick film. Within the grains, the carbon was found to be organised into clusters showing some onion-like structure, with amorphous material between them; energy dispersive X-ray spectroscopy (EDS) found these clusters to be Mo- and W-rich in a later, thinner sample of the same material. Electron energy-loss spectroscopy (EELS) showed no difference in C-K edge, implying the bonding type to be the same in cluster and matrix. These clusters were arranged into stripes parallel to the film plane, of spacing 7-8 nm; there was a modulation in spacing between clusters within these stripes that produced a second, coarser set of striations of spacing ∼37 nm.

KW - carbon coatings

KW - thick film

KW - carbon

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JO - Journal of Physics: Conference Series

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