Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings

J Sharp, I Castillo Muller, P Mandal, A Abbas, G West, W M Rainforth, A Ehiasarian, P Hovsepian

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Abstract

A FIB lift-out sample was made from a wear-resistant carbon coating deposited by high power impulse magnetron sputtering (HIPIMS) with Mo and W. TEM analysis found columnar grains extending the whole ∼1800 nm thick film. Within the grains, the carbon was found to be organised into clusters showing some onion-like structure, with amorphous material between them; energy dispersive X-ray spectroscopy (EDS) found these clusters to be Mo- and W-rich in a later, thinner sample of the same material. Electron energy-loss spectroscopy (EELS) showed no difference in C-K edge, implying the bonding type to be the same in cluster and matrix. These clusters were arranged into stripes parallel to the film plane, of spacing 7-8 nm; there was a modulation in spacing between clusters within these stripes that produced a second, coarser set of striations of spacing ∼37 nm.
Original languageEnglish
Article number012011
Number of pages4
JournalJournal of Physics: Conference Series
Volume644
DOIs
Publication statusPublished - 12 Oct 2015
Externally publishedYes

Keywords

  • carbon coatings
  • thick film
  • carbon

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