Critical impact of Ehrlich-Schwöbel barrier on GaN surface morphology during homoepitaxial growth

Nils A.K. Kaufmann, L. Lahourcade, B. Hourahine, D. Martin, N. Grandjean

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

We discuss the impact of kinetics, and in particular the effect of the Ehrlich-Schwöbel barrier (ESB), on the growth and surface morphology of homoepitaxial GaN layers. The presence of an ESB can lead to various self-assembled surface features, which strongly affect the surface roughness. We present an in-depth study of this phenomenon on GaN homoepitaxial layers grown by metal organic vapor phase epitaxy and molecular beam epitaxy. We show how a proper tuning of the growth parameters allows for the control of the surface morphology, independent of the growth technique.
LanguageEnglish
Pages36-42
Number of pages7
JournalJournal of Crystal Growth
Volume433
Early online date24 Jun 2015
DOIs
Publication statusPublished - 1 Jan 2016

Fingerprint

Surface morphology
Vapor phase epitaxy
Molecular beam epitaxy
vapor phase epitaxy
surface roughness
molecular beam epitaxy
Tuning
Surface roughness
Metals
tuning
Kinetics
kinetics
metals

Keywords

  • growth models
  • metalorganic chemical vapor deposition
  • molecular beam epitaxy
  • nitrides
  • semiconducting gallium compounds
  • surface structure

Cite this

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Critical impact of Ehrlich-Schwöbel barrier on GaN surface morphology during homoepitaxial growth. / Kaufmann, Nils A.K.; Lahourcade, L.; Hourahine, B.; Martin, D.; Grandjean, N.

In: Journal of Crystal Growth, Vol. 433, 01.01.2016, p. 36-42.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Critical impact of Ehrlich-Schwöbel barrier on GaN surface morphology during homoepitaxial growth

AU - Kaufmann, Nils A.K.

AU - Lahourcade, L.

AU - Hourahine, B.

AU - Martin, D.

AU - Grandjean, N.

PY - 2016/1/1

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KW - growth models

KW - metalorganic chemical vapor deposition

KW - molecular beam epitaxy

KW - nitrides

KW - semiconducting gallium compounds

KW - surface structure

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