Control of solid-state lasers using an intra-cavity MEMS micromirror

Walter Lubeigt, Joao Gomes, James Brown, Andrew Kelly, Vasili Savitski, Deepak Uttamchandani, David Burns

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


High reflectivity, electrothermal and electrostatic MEMS (Micro-Electro-Mechanical Systems) micromirrors were used as a control element within a Nd-doped laser cavity. Stable continuous-wave oscillation of a 3-mirror Nd:YLF laser at a maximum output power of 200mW was limited by thermally-induced surface deformation of the micromirror. An electrostatic micromirror was used to induce Q-switching, resulting in pulse durations of 220ns - 2μs over a repetition frequency range of 6kHz - 40kHz.
Original languageEnglish
Pages (from-to)2456-2465
Number of pages10
JournalOptics Express
Issue number3
Publication statusPublished - 31 Jan 2011


  • optics
  • solid state laser
  • MEMS micromirror
  • laser cavity


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