High reflectivity, electrothermal and electrostatic MEMS (Micro-Electro-Mechanical Systems) micromirrors were used as a control element within a Nd-doped laser cavity. Stable continuous-wave oscillation of a 3-mirror Nd:YLF laser at a maximum output power of 200mW was limited by thermally-induced surface deformation of the micromirror. An electrostatic micromirror was used to induce Q-switching, resulting in pulse durations of 220ns - 2μs over a repetition frequency range of 6kHz - 40kHz.
- solid state laser
- MEMS micromirror
- laser cavity
Lubeigt, W., Gomes, J., Brown, J., Kelly, A., Savitski, V., Uttamchandani, D., & Burns, D. (2011). Control of solid-state lasers using an intra-cavity MEMS micromirror. Optics Express, 19(3), 2456-2465. https://doi.org/10.1364/OE.19.002456