Continuous roller transfer-printing of QVGA semiconductor micro-pixel arrays

Eleni Margariti; Benoit Guilhabert; Gemma Quinn; Dimitars Jevtics; Martin D. Dawson; Michael J. Strain

doi:10.1109/ipc53466.2022.9975605

Continuous roller transfer-printing of QVGA semiconductor micro-pixel arrays

Eleni Margariti, Benoit Guilhabert, Gemma Quinn, Dimitars Jevtics, Martin D. Dawson, Michael J. Strain

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

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Abstract

We demonstrate an automated roll-transfer printing method for the parallel integration of >75k devices in a single shot. Automated high resolution metrology shows semiconductor micro-pixel array transfer with 1.43 μ m printing accuracy and 95 % yield.

Original language	English
Title of host publication	2022 IEEE Photonics Conference (IPC)
Subtitle of host publication	Proceedings
Place of Publication	Piscataway, NJ
Publisher	IEEE
Number of pages	2
ISBN (Electronic)	9781665434874
ISBN (Print)	9781665434881
DOIs	https://doi.org/10.1109/ipc53466.2022.9975605
Publication status	Published - 14 Dec 2022
Event	IEEE Photonics Conference: The Annual Conference of the IEEE Photonics Society - Hyatt Regency Hotel, Vancouver, Canada Duration: 13 Nov 2022 → 17 Nov 2022 https://ieee-ipc.org/

Publication series

Name	2022 IEEE Photonics Conference (IPC)
Publisher	IEEE
ISSN (Print)	2374-0140
ISSN (Electronic)	2575-274X

Conference

Conference	IEEE Photonics Conference
Abbreviated title	IPC
Country/Territory	Canada
City	Vancouver
Period	13/11/22 → 17/11/22
Internet address	https://ieee-ipc.org/

Keywords

roll-transfer printing
automated high resolution metrology
parallel integration
image resolution
printing
micrometers
photonics
heterogeneous integration
mass transfer
pixel arrays

Access to Document

10.1109/ipc53466.2022.9975605

Margariti-etal-IPC-2022-Continuous-roller-transfer-printing-of-QVGAAccepted author manuscript, 935 KBLicence: Strath_1

Zero-change manufacturing of photonic interconnects for silicon electronics (IntraChip)
Strain, M.
EPSRC (Engineering and Physical Sciences Research Council)
1/12/20 → 31/05/24
Project: Research
'Hetero-print': A holistic approach to transfer-printing for heterogeneous integration in manufacturing
Dawson, M., Martin, R., Strain, M., Watson, I. & Guilhabert, B. J. E.
EPSRC (Engineering and Physical Sciences Research Council)
1/06/18 → 31/05/24
Project: Research
Parallel Heterogeneous Integration of III-V Devices on Silicon Photonic Chips
Strain, M.
EPSRC (Engineering and Physical Sciences Research Council)
1/05/17 → 31/12/21
Project: Research

Cite this

@inproceedings{da4e2a49d0344d508059fb3fdc2db81f,

title = "Continuous roller transfer-printing of QVGA semiconductor micro-pixel arrays",

abstract = "We demonstrate an automated roll-transfer printing method for the parallel integration of >75k devices in a single shot. Automated high resolution metrology shows semiconductor micro-pixel array transfer with 1.43 μ m printing accuracy and 95 % yield.",

keywords = "roll-transfer printing, automated high resolution metrology, parallel integration, image resolution, printing, micrometers, photonics, heterogeneous integration, mass transfer, pixel arrays",

author = "Eleni Margariti and Benoit Guilhabert and Gemma Quinn and Dimitars Jevtics and Dawson, {Martin D.} and Strain, {Michael J.}",

note = "{\textcopyright} 2024 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; IEEE Photonics Conference : The Annual Conference of the IEEE Photonics Society, IPC ; Conference date: 13-11-2022 Through 17-11-2022",

year = "2022",

month = dec,

day = "14",

doi = "10.1109/ipc53466.2022.9975605",

language = "English",

isbn = "9781665434881",

series = "2022 IEEE Photonics Conference (IPC)",

publisher = "IEEE",

booktitle = "2022 IEEE Photonics Conference (IPC)",

url = "https://ieee-ipc.org/",

}

Margariti, E , Guilhabert, B , Quinn, G , Jevtics, D , Dawson, MD & Strain, MJ 2022, Continuous roller transfer-printing of QVGA semiconductor micro-pixel arrays. in 2022 IEEE Photonics Conference (IPC): Proceedings. 2022 IEEE Photonics Conference (IPC), IEEE, Piscataway, NJ, IEEE Photonics Conference, Vancouver, Canada, 13/11/22. https://doi.org/10.1109/ipc53466.2022.9975605

TY - GEN

T1 - Continuous roller transfer-printing of QVGA semiconductor micro-pixel arrays

AU - Margariti, Eleni

AU - Guilhabert, Benoit

AU - Quinn, Gemma

AU - Jevtics, Dimitars

AU - Dawson, Martin D.

AU - Strain, Michael J.

N1 - © 2024 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2022/12/14

Y1 - 2022/12/14

N2 - We demonstrate an automated roll-transfer printing method for the parallel integration of >75k devices in a single shot. Automated high resolution metrology shows semiconductor micro-pixel array transfer with 1.43 μ m printing accuracy and 95 % yield.

AB - We demonstrate an automated roll-transfer printing method for the parallel integration of >75k devices in a single shot. Automated high resolution metrology shows semiconductor micro-pixel array transfer with 1.43 μ m printing accuracy and 95 % yield.

KW - roll-transfer printing

KW - automated high resolution metrology

KW - parallel integration

KW - image resolution

KW - printing

KW - micrometers

KW - photonics

KW - heterogeneous integration

KW - mass transfer

KW - pixel arrays

U2 - 10.1109/ipc53466.2022.9975605

DO - 10.1109/ipc53466.2022.9975605

M3 - Conference contribution book

SN - 9781665434881

T3 - 2022 IEEE Photonics Conference (IPC)

BT - 2022 IEEE Photonics Conference (IPC)

PB - IEEE

CY - Piscataway, NJ

T2 - IEEE Photonics Conference

Y2 - 13 November 2022 through 17 November 2022

ER -

Continuous roller transfer-printing of QVGA semiconductor micro-pixel arrays

Abstract

Publication series

Conference

Keywords

Access to Document

Fingerprint

Projects

Zero-change manufacturing of photonic interconnects for silicon electronics (IntraChip)

'Hetero-print': A holistic approach to transfer-printing for heterogeneous integration in manufacturing

Parallel Heterogeneous Integration of III-V Devices on Silicon Photonic Chips

Cite this