Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot

Eleni Margariti; Gemma Quinn; Dimitars Jevtics; Benoit Guilhabert; Martin D. Dawson; Michael J. Strain

doi:10.1364/OME.483657

Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot

Eleni Margariti, Gemma Quinn, Dimitars Jevtics, Benoit Guilhabert, Martin D. Dawson, Michael J. Strain

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

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Abstract

A continuous, single shot roller transfer printing process is presented for the large-scale hybrid integration of semiconductor devices. Transfer of a 320 × 240 pixel micro-LED array, representing >75,000 individual devices in a single shot with sub-micron relative position accuracy is demonstrated. The transfer printing process preserves the array geometry with pixel spatial location error less than 1 µm deviation from the as-designed layout. An automated sub-micron precision metrology system based on simple optical microscopy was developed to asses such large device populations and allow the assessment of yield.

Original language	English
Pages (from-to)	2236-2250
Number of pages	15
Journal	Optical Materials Express
Volume	13
Issue number	8
DOIs	https://doi.org/10.1364/OME.483657
Publication status	Published - 13 Jul 2023

Keywords

transfer printing
semiconductor devices
submicron precision

Access to Document

10.1364/OME.483657Licence: CC BY 4.0

Margariti-etal-OME-2023-Continuous-roller-transfer-printing-and-automated-metrologyFinal published version, 6.47 MBLicence: CC BY 4.0

Zero-change manufacturing of photonic interconnects for silicon electronics (IntraChip)
Strain, M. (Principal Investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/12/20 → 31/05/24
Project: Research
'Hetero-print': A holistic approach to transfer-printing for heterogeneous integration in manufacturing
Dawson, M. (Principal Investigator), Martin, R. (Co-investigator), Strain, M. (Co-investigator), Watson, I. (Co-investigator) & Guilhabert, B. J. E. (Research Co-investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/06/18 → 31/05/24
Project: Research
Parallel Heterogeneous Integration of III-V Devices on Silicon Photonic Chips
Strain, M. (Principal Investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/05/17 → 31/12/21
Project: Research

Data for: ''Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot ''
Margariti, E. (Creator), Quinn, G. (Contributor), Jevtics, D. (Contributor), Guilhabert, B. J. E. (Contributor), Strain, M. (Contributor) & Dawson, M. (Contributor), University of Strathclyde, 15 Dec 2022
DOI: 10.15129/a2056265-495a-422a-b65f-0570923e471a
Dataset

Cite this

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title = "Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot",

abstract = "A continuous, single shot roller transfer printing process is presented for the large-scale hybrid integration of semiconductor devices. Transfer of a 320 × 240 pixel micro-LED array, representing >75,000 individual devices in a single shot with sub-micron relative position accuracy is demonstrated. The transfer printing process preserves the array geometry with pixel spatial location error less than 1 µm deviation from the as-designed layout. An automated sub-micron precision metrology system based on simple optical microscopy was developed to asses such large device populations and allow the assessment of yield.",

keywords = "transfer printing, semiconductor devices, submicron precision",

author = "Eleni Margariti and Gemma Quinn and Dimitars Jevtics and Benoit Guilhabert and Dawson, \{Martin D.\} and Strain, \{Michael J.\}",

year = "2023",

month = jul,

day = "13",

doi = "10.1364/OME.483657",

language = "English",

volume = "13",

pages = "2236--2250",

journal = "Optical Materials Express",

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T1 - Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot

AU - Margariti, Eleni

AU - Quinn, Gemma

AU - Jevtics, Dimitars

AU - Guilhabert, Benoit

AU - Dawson, Martin D.

AU - Strain, Michael J.

PY - 2023/7/13

Y1 - 2023/7/13

N2 - A continuous, single shot roller transfer printing process is presented for the large-scale hybrid integration of semiconductor devices. Transfer of a 320 × 240 pixel micro-LED array, representing >75,000 individual devices in a single shot with sub-micron relative position accuracy is demonstrated. The transfer printing process preserves the array geometry with pixel spatial location error less than 1 µm deviation from the as-designed layout. An automated sub-micron precision metrology system based on simple optical microscopy was developed to asses such large device populations and allow the assessment of yield.

AB - A continuous, single shot roller transfer printing process is presented for the large-scale hybrid integration of semiconductor devices. Transfer of a 320 × 240 pixel micro-LED array, representing >75,000 individual devices in a single shot with sub-micron relative position accuracy is demonstrated. The transfer printing process preserves the array geometry with pixel spatial location error less than 1 µm deviation from the as-designed layout. An automated sub-micron precision metrology system based on simple optical microscopy was developed to asses such large device populations and allow the assessment of yield.

KW - transfer printing

KW - semiconductor devices

KW - submicron precision

U2 - 10.1364/OME.483657

DO - 10.1364/OME.483657

M3 - Article

SN - 2159-3930

VL - 13

SP - 2236

EP - 2250

JO - Optical Materials Express

JF - Optical Materials Express

IS - 8

ER -

Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot

Abstract

Keywords

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Projects

Zero-change manufacturing of photonic interconnects for silicon electronics (IntraChip)

'Hetero-print': A holistic approach to transfer-printing for heterogeneous integration in manufacturing

Parallel Heterogeneous Integration of III-V Devices on Silicon Photonic Chips

Datasets

Data for: ''Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot ''

Cite this