Concave cavity for integrated microfabricated sensor

Ann Gabrys (Inventor), Nathan Brockie (Inventor), Terry Dyer (Inventor), Roozbeh Parsa (Inventor), William French (Inventor)

Research output: Patent

Abstract

An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.
Original languageEnglish
Patent number20180259596
IPCG01R 33/032
Filing date13/03/17
Publication statusPublished - 13 Sep 2018

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  • Cite this

    Gabrys, A., Brockie, N., Dyer, T., Parsa, R., & French, W. (2018). IPC No. G01R 33/032. Concave cavity for integrated microfabricated sensor. (Patent No. 20180259596).