Comparison of the curvature homogeneity and dynamic behaviour of framed and frameless electrostatic X/Y scanning micromirrors

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Experimental investigations on the influence of a frame structure around an electrostatic comb-drive actuated micromirror are presented. The comparison between two 800 mm diameter mirrors, one framed and the other frameless, fabricated with a multi-user silicon-on-insulator process was carried out in relation to the dynamic movement behaviour and the static and dynamic curvature of the mirror surfaces. Both mirror types used in the study were carefully chosen to have a similar diameter and torsional resonant frequency of the order of 7 kHz and are actuated with 10 pairs of comb-fingers. The inclusion of the frame structure is shown to increase the homogeneity of the curvature of the mirror, with a difference of radius of curvature between the main axes of 1% compared to a 10% difference for the frameless mirror. The frame also increases the achievable maximum resonant tilt angle around the second main axis by a factor of three, at the same time avoiding nonlinear frequency responses (such as hysteresis) in the tilt angle against frequency curve.
LanguageEnglish
Pages425-428
Number of pages4
JournalMicro and Nano Letters
Volume6
Issue number6
DOIs
Publication statusPublished - 1 Jun 2011

Fingerprint

homogeneity
Electrostatics
Mirrors
curvature
electrostatics
mirrors
Scanning
scanning
Silicon
Frequency response
Hysteresis
Natural frequencies
frequency response
resonant frequencies
hysteresis
insulators
inclusions
radii
silicon
curves

Keywords

  • curvature measurement
  • micromirrors
  • nonlinear optics
  • silicon-on-insulator

Cite this

@article{96db97bf67dd4eb6af8ecc4a8e37085d,
title = "Comparison of the curvature homogeneity and dynamic behaviour of framed and frameless electrostatic X/Y scanning micromirrors",
abstract = "Experimental investigations on the influence of a frame structure around an electrostatic comb-drive actuated micromirror are presented. The comparison between two 800 mm diameter mirrors, one framed and the other frameless, fabricated with a multi-user silicon-on-insulator process was carried out in relation to the dynamic movement behaviour and the static and dynamic curvature of the mirror surfaces. Both mirror types used in the study were carefully chosen to have a similar diameter and torsional resonant frequency of the order of 7 kHz and are actuated with 10 pairs of comb-fingers. The inclusion of the frame structure is shown to increase the homogeneity of the curvature of the mirror, with a difference of radius of curvature between the main axes of 1{\%} compared to a 10{\%} difference for the frameless mirror. The frame also increases the achievable maximum resonant tilt angle around the second main axis by a factor of three, at the same time avoiding nonlinear frequency responses (such as hysteresis) in the tilt angle against frequency curve.",
keywords = "curvature measurement, micromirrors , nonlinear optics, silicon-on-insulator",
author = "Ralf Bauer and James Brown and Deepak Uttamchandani",
year = "2011",
month = "6",
day = "1",
doi = "10.1049/mnl.2011.0113",
language = "English",
volume = "6",
pages = "425--428",
journal = "Micro and Nano Letters",
issn = "1750-0443",
number = "6",

}

TY - JOUR

T1 - Comparison of the curvature homogeneity and dynamic behaviour of framed and frameless electrostatic X/Y scanning micromirrors

AU - Bauer, Ralf

AU - Brown, James

AU - Uttamchandani, Deepak

PY - 2011/6/1

Y1 - 2011/6/1

N2 - Experimental investigations on the influence of a frame structure around an electrostatic comb-drive actuated micromirror are presented. The comparison between two 800 mm diameter mirrors, one framed and the other frameless, fabricated with a multi-user silicon-on-insulator process was carried out in relation to the dynamic movement behaviour and the static and dynamic curvature of the mirror surfaces. Both mirror types used in the study were carefully chosen to have a similar diameter and torsional resonant frequency of the order of 7 kHz and are actuated with 10 pairs of comb-fingers. The inclusion of the frame structure is shown to increase the homogeneity of the curvature of the mirror, with a difference of radius of curvature between the main axes of 1% compared to a 10% difference for the frameless mirror. The frame also increases the achievable maximum resonant tilt angle around the second main axis by a factor of three, at the same time avoiding nonlinear frequency responses (such as hysteresis) in the tilt angle against frequency curve.

AB - Experimental investigations on the influence of a frame structure around an electrostatic comb-drive actuated micromirror are presented. The comparison between two 800 mm diameter mirrors, one framed and the other frameless, fabricated with a multi-user silicon-on-insulator process was carried out in relation to the dynamic movement behaviour and the static and dynamic curvature of the mirror surfaces. Both mirror types used in the study were carefully chosen to have a similar diameter and torsional resonant frequency of the order of 7 kHz and are actuated with 10 pairs of comb-fingers. The inclusion of the frame structure is shown to increase the homogeneity of the curvature of the mirror, with a difference of radius of curvature between the main axes of 1% compared to a 10% difference for the frameless mirror. The frame also increases the achievable maximum resonant tilt angle around the second main axis by a factor of three, at the same time avoiding nonlinear frequency responses (such as hysteresis) in the tilt angle against frequency curve.

KW - curvature measurement

KW - micromirrors

KW - nonlinear optics

KW - silicon-on-insulator

UR - http://www.scopus.com/inward/record.url?scp=84863411272&partnerID=8YFLogxK

U2 - 10.1049/mnl.2011.0113

DO - 10.1049/mnl.2011.0113

M3 - Article

VL - 6

SP - 425

EP - 428

JO - Micro and Nano Letters

T2 - Micro and Nano Letters

JF - Micro and Nano Letters

SN - 1750-0443

IS - 6

ER -