Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.

Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics
PublisherIEEE
Pages157-158
Number of pages2
ISBN (Print)9780992841423
DOIs
Publication statusPublished - 17 Aug 2014
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: 17 Aug 201421 Aug 2014

Conference

Conference2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period17/08/1421/08/14

Keywords

  • gold
  • micromirrors
  • surface treatment
  • temperature measurement

Fingerprint Dive into the research topics of 'Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror'. Together they form a unique fingerprint.

  • Cite this