Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.

LanguageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics
PublisherIEEE
Pages157-158
Number of pages2
ISBN (Print)9780992841423
DOIs
Publication statusPublished - 17 Aug 2014
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: 17 Aug 201421 Aug 2014

Conference

Conference2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period17/08/1421/08/14

Fingerprint

Silicon
Gold
Temperature
Residual stresses
Elastic moduli
Finite element method

Keywords

  • gold
  • micromirrors
  • surface treatment
  • temperature measurement

Cite this

Paterson, Alan ; Li, Li ; Bauer, Ralf ; Lubeigt, Walter ; Uttamchandani, Deepak. / Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror. International Conference on Optical MEMS and Nanophotonics. IEEE, 2014. pp. 157-158
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title = "Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror",
abstract = "The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.",
keywords = "gold, micromirrors, surface treatment, temperature measurement",
author = "Alan Paterson and Li Li and Ralf Bauer and Walter Lubeigt and Deepak Uttamchandani",
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doi = "10.1109/OMN.2014.6924570",
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Paterson, A, Li, L, Bauer, R, Lubeigt, W & Uttamchandani, D 2014, Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror. in International Conference on Optical MEMS and Nanophotonics. IEEE, pp. 157-158, 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014, Glasgow, United Kingdom, 17/08/14. https://doi.org/10.1109/OMN.2014.6924570

Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror. / Paterson, Alan; Li, Li; Bauer, Ralf; Lubeigt, Walter; Uttamchandani, Deepak.

International Conference on Optical MEMS and Nanophotonics. IEEE, 2014. p. 157-158.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror

AU - Paterson, Alan

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N2 - The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.

AB - The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.

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