Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror

Alan Paterson; Li Li; Ralf Bauer; Walter Lubeigt; Deepak Uttamchandani

doi:10.1109/OMN.2014.6924570

Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror

Alan Paterson^*, Li Li, Ralf Bauer, Walter Lubeigt, Deepak Uttamchandani

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Abstract

The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics
Publisher	IEEE
Pages	157-158
Number of pages	2
ISBN (Print)	9780992841423
DOIs	https://doi.org/10.1109/OMN.2014.6924570
Publication status	Published - 17 Aug 2014
Event	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom Duration: 17 Aug 2014 → 21 Aug 2014

Conference

Conference	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Country/Territory	United Kingdom
City	Glasgow
Period	17/08/14 → 21/08/14

Keywords

gold
micromirrors
surface treatment
temperature measurement

Access to Document

10.1109/OMN.2014.6924570

Cite this

@inproceedings{038dfbea6e7a4e159a0d691486ff40a5,

title = "Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror",

abstract = "The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.",

keywords = "gold, micromirrors, surface treatment, temperature measurement",

author = "Alan Paterson and Li Li and Ralf Bauer and Walter Lubeigt and Deepak Uttamchandani",

year = "2014",

month = aug,

day = "17",

doi = "10.1109/OMN.2014.6924570",

language = "English",

isbn = "9780992841423",

pages = "157--158",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE",

note = "2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 ; Conference date: 17-08-2014 Through 21-08-2014",

}

Paterson, A, Li, L, Bauer, R, Lubeigt, W & Uttamchandani, D 2014, Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror. in International Conference on Optical MEMS and Nanophotonics. IEEE, pp. 157-158, 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014, Glasgow, United Kingdom, 17/08/14. https://doi.org/10.1109/OMN.2014.6924570

TY - GEN

T1 - Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror

AU - Paterson, Alan

AU - Li, Li

AU - Bauer, Ralf

AU - Lubeigt, Walter

AU - Uttamchandani, Deepak

PY - 2014/8/17

Y1 - 2014/8/17

N2 - The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.

AB - The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.

KW - gold

KW - micromirrors

KW - surface treatment

KW - temperature measurement

UR - http://www.scopus.com/inward/record.url?scp=84908025976&partnerID=8YFLogxK

U2 - 10.1109/OMN.2014.6924570

DO - 10.1109/OMN.2014.6924570

M3 - Conference contribution book

AN - SCOPUS:84908025976

SN - 9780992841423

SP - 157

EP - 158

BT - International Conference on Optical MEMS and Nanophotonics

PB - IEEE

T2 - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014

Y2 - 17 August 2014 through 21 August 2014

ER -

Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror

Abstract

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Keywords

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