Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS

Research output: Contribution to conference › Paper › peer-review

Original language	English
Pages	93-96
Number of pages	4
Publication status	Published - Jun 2009
Event	9th euspen International Conference - San Sebastain, Spain Duration: 2 Jun 2009 → 5 Jun 2009

Conference	9th euspen International Conference
Country/Territory	Spain
City	San Sebastain
Period	2/06/09 → 5/06/09

Cite this

@conference{9ae8d8bd77f84196b0ddaa70dcde0443,

title = "Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS",

author = "Jining Sun and Wenlong Chang and Xichun Luo",

year = "2009",

month = jun,

language = "English",

pages = "93--96",

note = "9th euspen International Conference ; Conference date: 02-06-2009 Through 05-06-2009",

}