Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS

Jining Sun, Wenlong Chang, Xichun Luo

Research output: Contribution to conferencePaper

LanguageEnglish
Pages93-96
Number of pages4
Publication statusPublished - Jun 2009
Event9th euspen International Conference - San Sebastain, Spain
Duration: 2 Jun 20095 Jun 2009

Conference

Conference9th euspen International Conference
CountrySpain
CitySan Sebastain
Period2/06/095/06/09

Cite this

Sun, J., Chang, W., & Luo, X. (2009). Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS. 93-96. Paper presented at 9th euspen International Conference, San Sebastain, Spain.
Sun, Jining ; Chang, Wenlong ; Luo, Xichun. / Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS. Paper presented at 9th euspen International Conference, San Sebastain, Spain.4 p.
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pages = "93--96",
note = "9th euspen International Conference ; Conference date: 02-06-2009 Through 05-06-2009",

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Sun, J, Chang, W & Luo, X 2009, 'Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS' Paper presented at 9th euspen International Conference, San Sebastain, Spain, 2/06/09 - 5/06/09, pp. 93-96.

Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS. / Sun, Jining; Chang, Wenlong; Luo, Xichun.

2009. 93-96 Paper presented at 9th euspen International Conference, San Sebastain, Spain.

Research output: Contribution to conferencePaper

TY - CONF

T1 - Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS

AU - Sun, Jining

AU - Chang, Wenlong

AU - Luo, Xichun

PY - 2009/6

Y1 - 2009/6

UR - https://www.euspen.eu/displayevent.asp?eventid=10

M3 - Paper

SP - 93

EP - 96

ER -

Sun J, Chang W, Luo X. Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS. 2009. Paper presented at 9th euspen International Conference, San Sebastain, Spain.