Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS

Jining Sun, Wenlong Chang, Xichun Luo

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Pages93-96
Number of pages4
Publication statusPublished - Jun 2009
Event9th euspen International Conference - San Sebastain, Spain
Duration: 2 Jun 20095 Jun 2009

Conference

Conference9th euspen International Conference
Country/TerritorySpain
CitySan Sebastain
Period2/06/095/06/09

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