Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS

Jining Sun, Wenlong Chang, Xichun Luo

Research output: Contribution to conferencePaper

Original languageEnglish
Pages93-96
Number of pages4
Publication statusPublished - Jun 2009
Event9th euspen International Conference - San Sebastain, Spain
Duration: 2 Jun 20095 Jun 2009

Conference

Conference9th euspen International Conference
CountrySpain
CitySan Sebastain
Period2/06/095/06/09

Cite this

Sun, J., Chang, W., & Luo, X. (2009). Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS. 93-96. Paper presented at 9th euspen International Conference, San Sebastain, Spain.