@inproceedings{8f00bd8eae5648ab9fde5b44be2db077,
title = "Comparison of dark and light-induced annealing of metastable defects in a-Si:H",
abstract = "This chapter looks at a comparison of dark and light-induced annealing of metastable defects in a-Si:H",
keywords = "comparison, dark, light-induced annealing , metastable defects, a-Si:H",
author = "Helena Gleskova and M. Nakata and S. Wagner",
year = "1994",
month = nov,
day = "4",
language = "English",
isbn = "9781558992368",
volume = "336",
series = "MRS Symposium Proceedings",
publisher = "Materials Research Society",
pages = "245--250",
editor = "M. Hack and A. Madan and A. Matsuda and M. Powell and Schiff, {E. A.}",
booktitle = "Amorphous silicon technology - 1994",
note = "MRS Spring Meeting 1994 ; Conference date: 04-04-1994 Through 08-04-1994",
}