Compact large-cross-section GaN directional couplers

Y. F. Zhang; L. McKnight; I. M. Watson; E. D. Gu; S. Calvez; M. D. Dawson

doi:10.1109/PHO.2011.6110599

Compact large-cross-section GaN directional couplers

Y. F. Zhang, L. McKnight, I. M. Watson, E. D. Gu, S. Calvez, M. D. Dawson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

2 Citations (Scopus)

Abstract

We report the design, fabrication and characterization of large-cross-section GaN waveguide directional couplers with mode-converting tapers. A positive RIE lag effect has been shown to significantly reduce overall device footprint.

Original language	English
Title of host publication	Proceedings of the 2011 IEEE Photonics Conference (PHO)
Place of Publication	New York
Publisher	IEEE
Pages	407-408
Number of pages	2
ISBN (Print)	9781424489404
DOIs	https://doi.org/10.1109/PHO.2011.6110599
Publication status	Published - Oct 2011
Event	24th Annual Meeting of the IEEE Photonics Society - Arlington, United States Duration: 9 Oct 2011 → 13 Oct 2011

Conference

Conference	24th Annual Meeting of the IEEE Photonics Society
Country/Territory	United States
City	Arlington
Period	9/10/11 → 13/10/11

Keywords

plasma etching
GaN
directional coupler
RIE lag
waveguide
large-cross-section
GaN directional couplers
gallium compounds
wide band gap semiconductors
optical directional couplers

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10.1109/PHO.2011.6110599

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title = "Compact large-cross-section GaN directional couplers",

abstract = "We report the design, fabrication and characterization of large-cross-section GaN waveguide directional couplers with mode-converting tapers. A positive RIE lag effect has been shown to significantly reduce overall device footprint.",

keywords = "plasma etching, GaN, directional coupler, RIE lag, waveguide, large-cross-section, GaN directional couplers, gallium compounds, wide band gap semiconductors, optical directional couplers",

author = "Zhang, {Y. F.} and L. McKnight and Watson, {I. M.} and Gu, {E. D.} and S. Calvez and Dawson, {M. D.}",

year = "2011",

month = oct,

doi = "10.1109/PHO.2011.6110599",

language = "English",

isbn = "9781424489404",

pages = "407--408",

booktitle = "Proceedings of the 2011 IEEE Photonics Conference (PHO)",

publisher = "IEEE",

note = "24th Annual Meeting of the IEEE Photonics Society ; Conference date: 09-10-2011 Through 13-10-2011",

}

TY - GEN

T1 - Compact large-cross-section GaN directional couplers

AU - Zhang, Y. F.

AU - McKnight, L.

AU - Watson, I. M.

AU - Gu, E. D.

AU - Calvez, S.

AU - Dawson, M. D.

PY - 2011/10

Y1 - 2011/10

N2 - We report the design, fabrication and characterization of large-cross-section GaN waveguide directional couplers with mode-converting tapers. A positive RIE lag effect has been shown to significantly reduce overall device footprint.

AB - We report the design, fabrication and characterization of large-cross-section GaN waveguide directional couplers with mode-converting tapers. A positive RIE lag effect has been shown to significantly reduce overall device footprint.

KW - plasma etching

KW - GaN

KW - directional coupler

KW - RIE lag

KW - waveguide

KW - large-cross-section

KW - GaN directional couplers

KW - gallium compounds

KW - wide band gap semiconductors

KW - optical directional couplers

UR - http://www.scopus.com/inward/record.url?scp=84862938962&partnerID=8YFLogxK

U2 - 10.1109/PHO.2011.6110599

DO - 10.1109/PHO.2011.6110599

M3 - Conference contribution book

SN - 9781424489404

SP - 407

EP - 408

BT - Proceedings of the 2011 IEEE Photonics Conference (PHO)

PB - IEEE

CY - New York

T2 - 24th Annual Meeting of the IEEE Photonics Society

Y2 - 9 October 2011 through 13 October 2011

ER -

Compact large-cross-section GaN directional couplers

Abstract

Conference

Keywords

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